IOE OpenIR  > 薄膜光学技术研究室(十一室)
离子束溅射沉积Ta2O5光学薄膜的实验研究
刘洪祥; 熊胜明; 李凌辉; 张云洞
Source Publication光电工程
Volume31Issue:3Pages:41-43,5
2004
Language中文
Indexed ByEi
Subtype期刊论文
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/937
Collection薄膜光学技术研究室(十一室)
Corresponding Author刘洪祥
Recommended Citation
GB/T 7714
刘洪祥,熊胜明,李凌辉,等. 离子束溅射沉积Ta2O5光学薄膜的实验研究[J]. 光电工程,2004,31(3):41-43,5.
APA 刘洪祥,熊胜明,李凌辉,&张云洞.(2004).离子束溅射沉积Ta2O5光学薄膜的实验研究.光电工程,31(3),41-43,5.
MLA 刘洪祥,et al."离子束溅射沉积Ta2O5光学薄膜的实验研究".光电工程 31.3(2004):41-43,5.
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