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Improving the performance of single point diamond turning surface with ion beam figuring
Huang, Yuetian1,2; Fan, Bin1; Wan, Yongjian1; Li, Shijie3
Source PublicationOPTIK
Volume172Pages:540-544
2018
Language英语
ISSN0030-4026
DOI10.1016/j.ijleo.2018.07.039
Indexed BySCI ; Ei
WOS IDWOS:000445714700066
EI Accession Number20183005594914
SubtypeJ
AbstractSingle point diamond turning (SPDT) can directly produce high precision optical parts, but some regularity micro structure in residual surface, and turning processing characteristics limit the surface quality to further improve. Ion beam figuring (IBF), as the last process of optical processing, can remove certain mid and high frequency errors, improve the surface performances without destroying their forms. Therefore, it is proposed to combine SPDT and IBF to manufacturing ultra-high precision surface. Two samples of diamond-turned sphere aluminum mirror were used in this experiment. One samples with surface PV and RMS 226 nm and 12.6 nm decreased to 113 nm and 7.7 run after ion beam figuring, another sample was improved in the same degree, and the turning marks is removed with surface roughness decreased to 2.8 nm from 3 nm. The experimental results indicate that IBF can remove the turning marks and improve the surface precision in a certain range without destroying the surface form.
KeywordSingle point diamond turning Turning marks Ion beam figuring Surface precision
WOS KeywordREMOVAL ; MARKS ; JET
EI KeywordsDiamonds ; Ions ; Surface roughness ; Turning
EI Classification Number482.2.1 Gems ; 604.2 Machining Operations ; 931.2 Physical Properties of Gases, Liquids and Solids ; 932.1 High Energy Physics
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Cited Times:1[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/9355
Collection先光中心
Affiliation1.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu; Sichuan; 610209, China;
2.Graduate University of Chinese Academy of Sciences, Beijing; 100049, China;
3.Shaanxi Province Key Laboratory of Thin Film Technology and Optical Test, Xi'an Technological University, Xi'an; Shaanxi; 710032, China
Recommended Citation
GB/T 7714
Huang, Yuetian,Fan, Bin,Wan, Yongjian,et al. Improving the performance of single point diamond turning surface with ion beam figuring[J]. OPTIK,2018,172:540-544.
APA Huang, Yuetian,Fan, Bin,Wan, Yongjian,&Li, Shijie.(2018).Improving the performance of single point diamond turning surface with ion beam figuring.OPTIK,172,540-544.
MLA Huang, Yuetian,et al."Improving the performance of single point diamond turning surface with ion beam figuring".OPTIK 172(2018):540-544.
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