IOE OpenIR  > 薄膜光学技术研究室(十一室)
Department薄膜光学技术研究室(十一室)
Determination of infrared refractive index of ZnS and YbF3 thin films by spectroscopy
Zhang, Yinhua1,2; Zhang, Kepeng1,2; Huang, Wei1; Xiong, Shengming1
Source PublicationOPTIK
Volume170Pages:321-327
2018
Language英语
ISSN0030-4026
DOI10.1016/j.ijleo.2018.05.137
Indexed BySCI ; Ei
WOS IDWOS:000440882500040
EI Accession Number20182305277125
SubtypeJ
AbstractThe refractive index of the infrared thin films was calculated by a relatively simple and accurate spectroscopy method. Using the Sellmeier dispersion model, the refractive index and thickness of the Zinc sulfide(ZnS) thin film were obtained by fitting the transmittance in the range of 2.5 mu m-11 mu m. At the same time, the refractive index and thickness of the ZnS thin films were also measured by VASE ellipsometer. The results show that the refractive index deviation between the values fitted by the transmittance and that measured by the VASE ellipsometer is < 0.02, and the relative deviation of the thickness is < 1%.The YbF3/ZnS bilayer coatings were deposited on the CVD Zinc selenide(ZnSe) substrate to obtain the refractive index of the ytterbium fluoride(YbF3) thin films wrapped in the coatings. Using the Sellmeier dispersion model, the refractive index of the YbF3 thin film wrapped in the coatings was obtained by fitting the transmittance of the YbF3/ZnS bilayer coatings in the range of 2.5 mu m-11 mu m. The results show that there are significant differences in the refractive index of the YbF3 thin films wrapped in coatings and that exposed to the atmosphere.The refractive index of the YbF3 thin film exposed to the atmosphere is abrupt because the YbF3 thin films adsorbs water vapor, while that of the YbF3 thin film wrapped in the coatings is no mutation.
KeywordYbF3 thin film ZnS thin film Refractive index Transmittance spectra
WOS KeywordOPTICAL-CONSTANT DETERMINATION ; ELLIPSOMETRY ; THICKNESS ; STRESS
EI KeywordsDispersion (waves) ; Ellipsometry ; Film thickness ; Fluorine compounds ; II-VI semiconductors ; Refractive index ; Spectroscopic analysis ; Sulfur compounds ; Ytterbium compounds ; Zinc coatings ; Zinc Selenide ; Zinc sulfide
EI Classification Number741.1 Light/Optics ; 801 Chemistry ; 804.2 Inorganic Compounds ; 813.2 Coating Materials ; 941.4 Optical Variables Measurements
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Cited Times:6[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/9352
Collection薄膜光学技术研究室(十一室)
Affiliation1.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu; 610209, China;
2.University of Chinese Academy of Sciences, Beijing; 100049, China
Recommended Citation
GB/T 7714
Zhang, Yinhua,Zhang, Kepeng,Huang, Wei,et al. Determination of infrared refractive index of ZnS and YbF3 thin films by spectroscopy[J]. OPTIK,2018,170:321-327.
APA Zhang, Yinhua,Zhang, Kepeng,Huang, Wei,&Xiong, Shengming.(2018).Determination of infrared refractive index of ZnS and YbF3 thin films by spectroscopy.OPTIK,170,321-327.
MLA Zhang, Yinhua,et al."Determination of infrared refractive index of ZnS and YbF3 thin films by spectroscopy".OPTIK 170(2018):321-327.
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