IOE OpenIR  > 薄膜光学技术研究室(十一室)
自动控制离子束溅射沉积光学薄膜系统设计
刘洪祥; 李凌辉; 申林; 熊胜明; 张云洞
Source Publication光学仪器
Volume26Issue:2Pages:83-86
2004
Language中文
Indexed By其他
Subtype期刊论文
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/935
Collection薄膜光学技术研究室(十一室)
Corresponding Author刘洪祥
Recommended Citation
GB/T 7714
刘洪祥,李凌辉,申林,等. 自动控制离子束溅射沉积光学薄膜系统设计[J]. 光学仪器,2004,26(2):83-86.
APA 刘洪祥,李凌辉,申林,熊胜明,&张云洞.(2004).自动控制离子束溅射沉积光学薄膜系统设计.光学仪器,26(2),83-86.
MLA 刘洪祥,et al."自动控制离子束溅射沉积光学薄膜系统设计".光学仪器 26.2(2004):83-86.
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