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Department薄膜光学技术研究室(十一室)
Performance optimization of 93 nm antireflective coatings with wide incident angle ranges on strongly curved spherical substrates
Liu, Cunding1,2; Kong, Mingdong1,2; Li, Bincheng1,3
Source PublicationOPTICS EXPRESS
Volume26Issue:15Pages:19524-19533
2018-07-13
Language英语
ISSN1094-4087
DOI10.1364/OE.26.019524
Indexed BySCI ; Ei
WOS IDWOS:000439472400062
EI Accession Number20183405727994
SubtypeJ
AbstractA method to optimize the spectral performance of 193 nm antireflective (AR) coating with a broad range of angle of incidence (AOI) on strongly curved spherical substrates is described. In this method, the actual film thickness on test plates for single-layer LaF3 and MgF2 films are corrected by measuring the relationship between the film thickness on test plates and that on quartz crystal microbalance. Interface roughness in multi-layer AR coating is obtained from atomic force microscopy measurements and its effect on the spectrum of the multi-layer is taken into account in this method by being simulated as a homogeneous sublayer. Porosities of the sublayers in AR coatings are obtained by reversely engineering the residual reflectance of the coatings/substrate/coating stacks. The obtained refractive indices and thicknesses in the multilayer are then used for analysis and optimization of the spectrum of 193 nm AR coatings. For strongly curved spherical surfaces, spectrum uniformity of the AR coating is optimized by taking into consideration simultaneously the merit functions at different positions of spherical substrates. This work provides a general solution to the performance optimization of 193 nm AR coatings with broad AOI range and on strongly curved spherical substrates. (C) 2018 Optical Society of America under the terms ol the OSA Open Access Publishing Agreement
KeywordAntireflection coatings Atomic force microscopy Film thickness Lanthanum compounds Magnesium compounds Refractive index Spheres
WOS KeywordMAGNESIUM FLUORIDE FILMS ; OPTICAL-CONSTANTS ; REFRACTIVE-INDEX ; THIN-FILM ; INTERFACE ROUGHNESS ; LAF3 ; INHOMOGENEITY ; THICKNESS ; MICROSTRUCTURE
EI KeywordsAntireflection coatings ; Atomic force microscopy ; Film thickness ; Lanthanum compounds ; Magnesium compounds ; Refractive index ; Spheres
EI Classification Number741.1 Light/Optics ; 741.3 Optical Devices and Systems ; 813.2 Coating Materials
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Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/9343
Collection薄膜光学技术研究室(十一室)
Affiliation1.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu; 610209, China;
2.University of the Chinese Academy of Sciences, Beijing; 100049, China;
3.School of Optoelectronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu; 610054, China
Recommended Citation
GB/T 7714
Liu, Cunding,Kong, Mingdong,Li, Bincheng. Performance optimization of 93 nm antireflective coatings with wide incident angle ranges on strongly curved spherical substrates[J]. OPTICS EXPRESS,2018,26(15):19524-19533.
APA Liu, Cunding,Kong, Mingdong,&Li, Bincheng.(2018).Performance optimization of 93 nm antireflective coatings with wide incident angle ranges on strongly curved spherical substrates.OPTICS EXPRESS,26(15),19524-19533.
MLA Liu, Cunding,et al."Performance optimization of 93 nm antireflective coatings with wide incident angle ranges on strongly curved spherical substrates".OPTICS EXPRESS 26.15(2018):19524-19533.
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