IOE OpenIR  > 微电子装备总体研究室(四室)
Department微电子装备总体研究室(四室)
Surface and thickness measurement of transparent thin-film layers utilizing modulation-based structured-illumination microscopy
Xie, Zhongye1,2; Tang, Yan1; Zhou, Yi1,2; Deng, Qinyuan1,2
Source PublicationOPTICS EXPRESS
Volume26Issue:3Pages:2944-2953
2018-02-05
Language英语
ISSN1094-4087
DOI10.1364/OE.26.002944
Indexed BySCI ; Ei
WOS IDWOS:000425365900071
EI Accession Number20180604765821
SubtypeJ
AbstractIn this research, an approach called modulation-based structured-illumination microscopy (MSIM) is proposed to measure the surface and thickness profile of thin film layers. With this method, a sinusoidal fringe pattern generated by digital micro-mirror devices (DMD) is projected on the sample. The modulation estimation of the reflected patterns is implemented for characterizing the surface and thickness profile of the sample. The measurement system is relatively simple and only an ordinary objective is enough to achieve imaging of the sample. In addition, the reflected signals that come from the back surface of the film create less disturbance to the front surface as compared with white-light interferometry. Consequently, they can be easily distinguished and achieve a successful measurement precisely. Both simulation and experiments are carried out to demonstrate the availability of this MISM method. The results are in excellent agreement with a commercial stage profiler and the relative uncertainty is less than 10 nm. (C) 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
KeywordDigital devices Film thickness Interferometry Modulation Thickness measurement
WOS KeywordPROFILE MEASUREMENT ; SCANNING INTERFEROMETRY ; LIGHT ; ELLIPSOMETRY
EI KeywordsDigital devices ; Film thickness ; Interferometry ; Modulation ; Thickness measurement
EI Classification Number941.4 Optical Variables Measurements ; 943.2 Mechanical Variables Measurements
Citation statistics
Cited Times:4[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/9339
Collection微电子装备总体研究室(四室)
Affiliation1.State Key Laboratory of Optical Technologies for Micro-fabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, Sichuan; 610209, China;
2.University of Chinese, Academy of Sciences, Beijing; 100049, China
Recommended Citation
GB/T 7714
Xie, Zhongye,Tang, Yan,Zhou, Yi,et al. Surface and thickness measurement of transparent thin-film layers utilizing modulation-based structured-illumination microscopy[J]. OPTICS EXPRESS,2018,26(3):2944-2953.
APA Xie, Zhongye,Tang, Yan,Zhou, Yi,&Deng, Qinyuan.(2018).Surface and thickness measurement of transparent thin-film layers utilizing modulation-based structured-illumination microscopy.OPTICS EXPRESS,26(3),2944-2953.
MLA Xie, Zhongye,et al."Surface and thickness measurement of transparent thin-film layers utilizing modulation-based structured-illumination microscopy".OPTICS EXPRESS 26.3(2018):2944-2953.
Files in This Item:
File Name/Size DocType Version Access License
2018-2106.pdf(3694KB)期刊论文出版稿开放获取CC BY-NC-SAApplication Full Text
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[Xie, Zhongye]'s Articles
[Tang, Yan]'s Articles
[Zhou, Yi]'s Articles
Baidu academic
Similar articles in Baidu academic
[Xie, Zhongye]'s Articles
[Tang, Yan]'s Articles
[Zhou, Yi]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[Xie, Zhongye]'s Articles
[Tang, Yan]'s Articles
[Zhou, Yi]'s Articles
Terms of Use
No data!
Social Bookmark/Share
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.