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Department微电子装备总体研究室(四室)
Fabrication of Random Microwell Arrays as Pseudo-Thermal Speckle Light Source
Cao, Axiu1,2; Pang, Hui1; Wang, Jiazhou1,2; Shi, Lifang1; Deng, Qiling1; Hu, Song1
Source PublicationMICROMACHINES
Volume9Issue:6Pages:256
2018-06-01
Language英语
ISSN2072-666X
DOI10.3390/mi9060256
Indexed BySCI ; Ei
WOS IDWOS:000436506300002
EI Accession Number20182205264837
SubtypeJ
AbstractQuantum correlated imaging using the intensity fluctuations of thermal light possesses advantages of high resolution and strong anti-interference ability. The common method to produce pseudo-thermal light source is using a rotary ground glass and transmission of laser beam. In the present work, we propose a method for the fabrication of microwell arrays with randomly varied diameters, which could be used as a new structural element for pseudo-thermal speckle light source. If these are etched with random sizes then they may also have random and complex varying curvatures (diffusion limited etching) leading to random destructive interference of the coherent beam which could be a good thing. The microwell arrays, with diameters randomly varying from 5 m to 40 m, height varying from 200 nm to 20 m, were fabricated by photolithography combined with acid etching. The experimental conditions are simple and can be scaled up to for large structures. The produced microwell arrays can transform the laser beam to a pseudo-thermal light source with a certain divergent angle by rational designing of mask and adjustable process parameters.
Keywordmicrofabrication microwell arrays speckle light source pseudo-thermal source
WOS KeywordIMAGE
EI KeywordsEtching ; Fabrication ; Laser beams ; Microchannels ; Microfabrication ; Speckle
EI Classification Number741.1 Light/Optics ; 744.8 Laser Beam Interactions ; 802.2 Chemical Reactions
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Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/9312
Collection微电子装备总体研究室(四室)
Affiliation1.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu; 610209, China;
2.University of Chinese Academy of Sciences, Beijing; 100049, China
Recommended Citation
GB/T 7714
Cao, Axiu,Pang, Hui,Wang, Jiazhou,et al. Fabrication of Random Microwell Arrays as Pseudo-Thermal Speckle Light Source[J]. MICROMACHINES,2018,9(6):256.
APA Cao, Axiu,Pang, Hui,Wang, Jiazhou,Shi, Lifang,Deng, Qiling,&Hu, Song.(2018).Fabrication of Random Microwell Arrays as Pseudo-Thermal Speckle Light Source.MICROMACHINES,9(6),256.
MLA Cao, Axiu,et al."Fabrication of Random Microwell Arrays as Pseudo-Thermal Speckle Light Source".MICROMACHINES 9.6(2018):256.
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