Department | 质量处(质检中心) |
Flatness measurement of large flat with two-station laser trackers | |
Li, Jie; Yang, Jie; Wu, Shibin; Cao, Xuedong | |
Source Publication | INTERNATIONAL JOURNAL OF OPTOMECHATRONICS
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Volume | 12Issue:1Pages:53-62 |
2018 | |
Language | 英语 |
ISSN | 1559-9612 |
DOI | 10.1080/15599612.2018.1529846 |
Indexed By | SCI ; Ei |
WOS ID | WOS:000455367600001 |
EI Accession Number | 20191506771595 |
Subtype | J |
Abstract | We present a novel method to accurately measure the flatness of a large flat. The method can be seen as a task-specific error correction of the laser tracker. Laser trackers are positioned at two specific measuring stations and measure the coordinates of the same sample points. The angular errors of the primary laser tracker are compensated with constraint information provided by an additional laser tracker. Using this method, we measure the flatness of a 4.5m flat. The flatness measurement uncertainty is 1.4 mu m in rms (root mean square). |
Keyword | Flatness measurement large-scale metrology error compensation coordinate measuring machine laser tracker |
EI Keywords | Coordinate measuring machines ; Error compensation ; Error correction |
EI Classification Number | 922.1 Probability Theory ; 943.3 Special Purpose Instruments |
Citation statistics | |
Document Type | 期刊论文 |
Identifier | http://ir.ioe.ac.cn/handle/181551/9291 |
Collection | 质量处(质检中心) |
Affiliation | Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, China |
Recommended Citation GB/T 7714 | Li, Jie,Yang, Jie,Wu, Shibin,et al. Flatness measurement of large flat with two-station laser trackers[J]. INTERNATIONAL JOURNAL OF OPTOMECHATRONICS,2018,12(1):53-62. |
APA | Li, Jie,Yang, Jie,Wu, Shibin,&Cao, Xuedong.(2018).Flatness measurement of large flat with two-station laser trackers.INTERNATIONAL JOURNAL OF OPTOMECHATRONICS,12(1),53-62. |
MLA | Li, Jie,et al."Flatness measurement of large flat with two-station laser trackers".INTERNATIONAL JOURNAL OF OPTOMECHATRONICS 12.1(2018):53-62. |
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2018-2058.pdf(2075KB) | 期刊论文 | 出版稿 | 开放获取 | CC BY-NC-SA | View Application Full Text |
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