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Flatness measurement of large flat with two-station laser trackers
Li, Jie; Yang, Jie; Wu, Shibin; Cao, Xuedong
Source PublicationINTERNATIONAL JOURNAL OF OPTOMECHATRONICS
Volume12Issue:1Pages:53-62
2018
Language英语
ISSN1559-9612
DOI10.1080/15599612.2018.1529846
Indexed BySCI ; Ei
WOS IDWOS:000455367600001
EI Accession Number20191506771595
SubtypeJ
AbstractWe present a novel method to accurately measure the flatness of a large flat. The method can be seen as a task-specific error correction of the laser tracker. Laser trackers are positioned at two specific measuring stations and measure the coordinates of the same sample points. The angular errors of the primary laser tracker are compensated with constraint information provided by an additional laser tracker. Using this method, we measure the flatness of a 4.5m flat. The flatness measurement uncertainty is 1.4 mu m in rms (root mean square).
KeywordFlatness measurement large-scale metrology error compensation coordinate measuring machine laser tracker
EI KeywordsCoordinate measuring machines ; Error compensation ; Error correction
EI Classification Number922.1 Probability Theory ; 943.3 Special Purpose Instruments
Citation statistics
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/9291
Collection质量处(质检中心)
AffiliationInstitute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, China
Recommended Citation
GB/T 7714
Li, Jie,Yang, Jie,Wu, Shibin,et al. Flatness measurement of large flat with two-station laser trackers[J]. INTERNATIONAL JOURNAL OF OPTOMECHATRONICS,2018,12(1):53-62.
APA Li, Jie,Yang, Jie,Wu, Shibin,&Cao, Xuedong.(2018).Flatness measurement of large flat with two-station laser trackers.INTERNATIONAL JOURNAL OF OPTOMECHATRONICS,12(1),53-62.
MLA Li, Jie,et al."Flatness measurement of large flat with two-station laser trackers".INTERNATIONAL JOURNAL OF OPTOMECHATRONICS 12.1(2018):53-62.
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