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Department微电子装备总体研究室(四室)
Spatial Modulation-Assisted Scanning White-Light Interferometry for Noise Suppression
Deng, Qinyuan1,2; Liu, Junbo1; Tang, Yan3; Zhou, Yi1; Yang, Yong1; Li, Jinlong1; Hu, Song1
Source PublicationIEEE PHOTONICS TECHNOLOGY LETTERS
Volume30Issue:4Pages:379-382
2018-02-15
Language英语
ISSN1041-1135
DOI10.1109/LPT.2017.2787100
Indexed BySCI ; Ei
WOS IDWOS:000424058900021
EI Accession Number20180104604747
SubtypeJ
AbstractA route of spatial modulation-assisted scanning white-light interferometry with the inhibition of background noises and light source fluctuations for the topography measurement of micro-/nano-structure surface was explored in this letter. The spatial modulation frequency was introduced by tilting the sample at a small angle to separate the noise signals and interference signals in the spatial frequency domain. A band-pass filter and a normalization processing were also applied with the purpose of signal-to-noise-ratio improvement and contrast enhancement. The frequency domain analysis was then enrolled in the elimination of 2 pi ambiguity for the surface recovery with high-presicion. Both the theoretical analysis and the experiment results reveal the validity of spatial modulation-assisted scanning white-light interferometry and its potentials in high-fidelity measurement of smooth surfaces regardless of external disturbances.
KeywordSurface measurement noise suppression spatial modulation
WOS KeywordPHASE-SHIFTING ALGORITHMS ; FRINGE-ORDER DETERMINATION ; MEASUREMENT UNCERTAINTY ; ROUGH SURFACES
EI KeywordsBandpass filters ; Frequency domain analysis ; Interferometry ; Light sources ; Scanning ; Signal to noise ratio ; Surface measurement
EI Classification Number703.2 Electric Filters ; 716.1 Information Theory and Signal Processing ; 921.3 Mathematical Transformations ; 941.4 Optical Variables Measurements ; 943.2 Mechanical Variables Measurements
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Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/9285
Collection微电子装备总体研究室(四室)
Affiliation1.University of Chinese Academy of Sciences, Beijing; 100049, China;
2.State Key Laboratory of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu; 610209, China;
3.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu; 610209, China
Recommended Citation
GB/T 7714
Deng, Qinyuan,Liu, Junbo,Tang, Yan,et al. Spatial Modulation-Assisted Scanning White-Light Interferometry for Noise Suppression[J]. IEEE PHOTONICS TECHNOLOGY LETTERS,2018,30(4):379-382.
APA Deng, Qinyuan.,Liu, Junbo.,Tang, Yan.,Zhou, Yi.,Yang, Yong.,...&Hu, Song.(2018).Spatial Modulation-Assisted Scanning White-Light Interferometry for Noise Suppression.IEEE PHOTONICS TECHNOLOGY LETTERS,30(4),379-382.
MLA Deng, Qinyuan,et al."Spatial Modulation-Assisted Scanning White-Light Interferometry for Noise Suppression".IEEE PHOTONICS TECHNOLOGY LETTERS 30.4(2018):379-382.
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