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Effects of mask-alignment error on point spread function for multi-level Fresnel diffractive lenses
Liu, Dun1,2; Wu, Shibin1; Yang, Wei1; Wang, Lihua1; Fan, Bin1; Wu, Fan1
Source PublicationCHINESE OPTICS LETTERS
Volume16Issue:9Pages:90501
2018-09-10
Language英语
ISSN1671-7694
DOI10.3788/COL201816.090501
Indexed BySCI ; Ei
WOS IDWOS:000444167600002
EI Accession Number20184506032577
SubtypeJ
AbstractThe full aperture complex amplitude transmittance function of a multi-level diffraction lens with mask-alignment errors was derived based on scalar diffraction theory. The point spread function (PSF) was calculated by the Kirchhoff diffraction integral. It is found that the radius of the Airy disk increases with the increase of the error in the direction of misalignment, and the image center shifts along the direction of misalignment. A four-level diffractive lens with a diameter of 80 mm was fabricated, and its PSF and diffraction efficiency of +1st order were calculated and measured. The distribution of PSF is consistent with the calculated results, and the tested diffraction efficiency is slightly smaller than the calculated value; the relative error is 5.71%.
KeywordAlignment Diffraction efficiency Efficiency Errors
EI KeywordsAlignment ; Diffraction efficiency ; Efficiency ; Errors
EI Classification Number601.1 Mechanical Devices ; 741.1 Light/Optics ; 913.1 Production Engineering
Citation statistics
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/9272
Collection质量处(质检中心)
Affiliation1.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu; 610209, China;
2.University of Chinese Academy of Sciences, Beijing; 100049, China
Recommended Citation
GB/T 7714
Liu, Dun,Wu, Shibin,Yang, Wei,et al. Effects of mask-alignment error on point spread function for multi-level Fresnel diffractive lenses[J]. CHINESE OPTICS LETTERS,2018,16(9):90501.
APA Liu, Dun,Wu, Shibin,Yang, Wei,Wang, Lihua,Fan, Bin,&Wu, Fan.(2018).Effects of mask-alignment error on point spread function for multi-level Fresnel diffractive lenses.CHINESE OPTICS LETTERS,16(9),90501.
MLA Liu, Dun,et al."Effects of mask-alignment error on point spread function for multi-level Fresnel diffractive lenses".CHINESE OPTICS LETTERS 16.9(2018):90501.
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