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Department薄膜光学技术研究室(十一室)
Determination of refractive index and thickness of YbF3 thin films deposited at different bias voltages of APS ion source from spectrophotometric methods
Zhang, Yinhua1,2; Xiong, Shengming1; Huang, Wei1; Zhang, Kepeng1,2
Source PublicationADVANCED OPTICAL TECHNOLOGIES
Volume7Issue:1-2Pages:33-37
2018-04-01
Language英语
ISSN2192-8576
DOI10.1515/aot-2017-0072
Indexed BySCI
WOS IDWOS:000429104400004
SubtypeJ
Abstract

Ytterbium fluoride (YbF3) single thin films were prepared on sapphire and monocrystalline silicon substrates through conventional thermal evaporation and ion beam-assisted deposition (IAD), at bias voltages ranging from 50 to 160 V of the Leybold advanced plasma source (APS). By using the Cauchy dispersion model, the refractive index and thickness of the YbF3 thin films were obtained by fitting the 400-2500 nm transmittance of the monolayer YbF3 thin films on the sapphire substrate. At the same time, the refractive index and thickness of the YbF3 thin films on the monocrystalline silicon substrates were also measured using the VASE ellipsometer at wavelength from 400 to 2200 nm. The results showed that the refractive index deviation of the YbF3 thin films between the fitted values by the transmittance spectra and the measured values by the VASE ellipsometer was < 0.02 and the relative deviation of the thickness was < 1%. Furthermore, the refractive index of the YbF3 thin films increased with increasing APS bias voltage. The conventional YbF3 thin films and the IAD thin films deposited at low bias voltage revealed a negative inhomogeneity, and a higher bias voltage is beneficial for improving the homogeneity of YbF3 thin films.

KeywordBias Voltage Refractive Index Transmittance Spectra Ybf3 Thin Film
WOS KeywordOptical-constant Determination ; Assisted Deposition ; Synthetic Sapphire ; Coating Materials
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Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/9244
Collection薄膜光学技术研究室(十一室)
Affiliation1.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China;
2.University of Chinese Academy of Science, Beijing 100049,China
Recommended Citation
GB/T 7714
Zhang, Yinhua,Xiong, Shengming,Huang, Wei,et al. Determination of refractive index and thickness of YbF3 thin films deposited at different bias voltages of APS ion source from spectrophotometric methods[J]. ADVANCED OPTICAL TECHNOLOGIES,2018,7(1-2):33-37.
APA Zhang, Yinhua,Xiong, Shengming,Huang, Wei,&Zhang, Kepeng.(2018).Determination of refractive index and thickness of YbF3 thin films deposited at different bias voltages of APS ion source from spectrophotometric methods.ADVANCED OPTICAL TECHNOLOGIES,7(1-2),33-37.
MLA Zhang, Yinhua,et al."Determination of refractive index and thickness of YbF3 thin films deposited at different bias voltages of APS ion source from spectrophotometric methods".ADVANCED OPTICAL TECHNOLOGIES 7.1-2(2018):33-37.
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