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Department微电子装备总体研究室(四室)
Efficient Super-Resolution Imaging Method for Micro-Nano Structure Based On Structured Illumination Modulation
Yang Kejun; Tang Yan; Hu Song; Chen Chuyi
Source PublicationProceedings of SPIE - 9TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES (AOMATT 2018): META-SURFACE-WAVE AND PLANAR OPTICS
Volume10841
Pages108410H
2018
Language英语
ISSN0277-786X
DOI10.1117/12.2512326
Indexed BySCI
WOS IDWOS:000461820700016
SubtypeC
AbstractThe structured illumination microscopy fills an unmet need for minimally invasive tools to image micrometer and nano-scale structure. However, conventional structured illumination super-resolution methods require precise phase shift of the illumination pattern, which leads to an inefficient image reconstruction process and a complicated imaging system. To solve these problems, we propose a novel image reconstruction method using only two image to acquire the frequencies beyond the diffraction limit. This method has an efficient image post-processing, which obtains extended frequencies without accurate estimation of phase-shifting. The related simulations and experiments are carried out to demonstrate the feasibility of this method.
KeywordSuper-resolution imaging image reconstruction structured illumination optical measurement micro-nano structure phase shifting
WOS KeywordRESOLUTION LIMIT ; LIGHT
Conference Name9th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT) - Meta-Surface-Wave and Planar Optics9th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT) - Meta-Surface-Wave and Planar Optics
Conference DateJUN 26-29, 2018JUN 26-29, 2018
Conference PlaceChengdu, PEOPLES R CHINAChengdu, PEOPLES R CHINA
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Document Type会议论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/9146
Collection微电子装备总体研究室(四室)
Recommended Citation
GB/T 7714
Yang Kejun,Tang Yan,Hu Song,et al. Efficient Super-Resolution Imaging Method for Micro-Nano Structure Based On Structured Illumination Modulation[C],2018:108410H.
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