IOE OpenIR  > 微细加工光学技术国家重点实验室(开放室)
Department微细加工光学技术国家重点实验室(开放室)
Simple and rapid particle detection device for substrate surface
Ai, Lifu1,2; Zhang, Jian1; Wang, Changtao1,2; Luo, Xiangang1,2
Source PublicationProceedings of SPIE 10841 - 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Meta-Surface-Wave and Planar Optics
Volume10841
Pages1084106
2019
Language英语
ISSN0277-786X
DOI10.1117/12.2505570
Indexed ByEi
EI Accession Number20190706489108
Subtype会议论文
AbstractWith the rapid development of lithography technology, the processing width of lithography line is up to 10 nm. The tiny defects on the surface of substrate and particles attached to the surface have a great influence on the quality of lithography, especially the surface plasmons lithography, which requires the gap between the substrate and the mask should be controlled within dozens of nanometers, since the surface defects and particles seriously affect the quality of the surface plasmons lithography. Substrate detection device in foreign countries is costly, and the results detected by optical microscopes and electron microscopes can't meet the requirements of the current experiment. Therefore, a set of scattering detection device needs to be developed in order to meet the requirement of the defect detection of the substrate surface. © 2019 SPIE.
EI KeywordsImage processing - Light scattering - Manufacture - Optical data processing - Surface defects - Surface plasmons - Surface waves
Conference Name9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Meta-Surface-Wave and Planar Optics
Conference DateJune 26, 2018 - June 29, 2018
Conference PlaceChengdu, China
EI Classification Number537.1 Heat Treatment Processes - 723.2 Data Processing and Image Processing - 741.1 Light/Optics - 951 Materials Science
PublisherSPIE
Citation statistics
Document Type会议论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/9141
Collection微细加工光学技术国家重点实验室(开放室)
Affiliation1.State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, P.O.Box 350, Chengdu; 610209, China;
2.University of Chinese Academy of Sciences, Beijing; 100049, China
Recommended Citation
GB/T 7714
Ai, Lifu,Zhang, Jian,Wang, Changtao,et al. Simple and rapid particle detection device for substrate surface[C]:SPIE,2019:1084106.
Files in This Item:
File Name/Size DocType Version Access License
2019-2211.pdf(2117KB)会议论文 开放获取CC BY-NC-SAApplication Full Text
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[Ai, Lifu]'s Articles
[Zhang, Jian]'s Articles
[Wang, Changtao]'s Articles
Baidu academic
Similar articles in Baidu academic
[Ai, Lifu]'s Articles
[Zhang, Jian]'s Articles
[Wang, Changtao]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[Ai, Lifu]'s Articles
[Zhang, Jian]'s Articles
[Wang, Changtao]'s Articles
Terms of Use
No data!
Social Bookmark/Share
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.