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Department微细加工光学技术国家重点实验室(开放室)
Simple and rapid particle detection device for substrate surface
Ai, Lifu; Zhang, Jian; Wang, Changtao; Luo, Xiangang
Source PublicationProceedings of SPIE - 9TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES (AOMATT 2018): META-SURFACE-WAVE AND PLANAR OPTICS
Volume10841
Pages1084106
2018
Language英语
ISSN0277-786X
DOI10.1117/12.2505570
Indexed BySCI
WOS IDWOS:000461820700005
SubtypeC
AbstractWith the rapid development of lithography technology, the processing width of lithography line is up to 10 nm. The tiny defects on the surface of substrate and particles attached to the surface have a great influence on the quality of lithography, especially the surface plasmons lithography, which requires the gap between the substrate and the mask should be controlled within dozens of nanometers, since the surface defects and particles seriously affect the quality of the surface plasmons lithography. Substrate detection device in foreign countries is costly, and the results detected by optical microscopes and electron microscopes can't meet the requirements of the current experiment. Therefore, a set of scattering detection device needs to be developed in order to meet the requirement of the defect detection of the substrate surface.
KeywordSubstrate detection lithography image processing light scattering
WOS KeywordSCATTERING
Conference Name9th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT) - Meta-Surface-Wave and Planar Optics9th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT) - Meta-Surface-Wave and Planar Optics
Conference DateJUN 26-29, 2018JUN 26-29, 2018
Conference PlaceChengdu, PEOPLES R CHINAChengdu, PEOPLES R CHINA
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Document Type会议论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/9141
Collection微细加工光学技术国家重点实验室(开放室)
Recommended Citation
GB/T 7714
Ai, Lifu,Zhang, Jian,Wang, Changtao,et al. Simple and rapid particle detection device for substrate surface[C],2018:1084106.
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