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Department微电子装备总体研究室(四室)
Fast thickness measurement of thin films using two-dimensional Fourier transform-based structured illumination microscopy
Xie, Zhongye; Tang, Yan; Liu, Xi; Yang, Kejun; Hu, Song
Source PublicationProceedings of SPIE - 9TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES (AOMATT 2018): META-SURFACE-WAVE AND PLANAR OPTICS
Volume10841
Pages1084105
2018
Language英语
ISSN0277-786X
DOI10.1117/12.2505137
Indexed BySCI
WOS IDWOS:000461820700004
SubtypeC
AbstractEffective measurement of the surface and thickness variation of thin films are important to achieve a special function and better performance for a coated optical device. In this research, we propose a new incoherent technique named Fourier transform based structured illumination microscopy (FTSIM) to detect the surface topography and thickness distribution. In this technique, a sinusoidal fringe pattern produced by digital micro-mirror devices (DMD) is projected onto the sample. The modulation estimation which depends on the surface and thickness of thin films is obtained by two-dimensional Fourier transform algorithm. Further, separating the reflected signals from the film boundaries, the surface finish of the film, as well as a film thickness map, can be achieved at the same time. With this method, only one pattern is required to determine the modulation value of a whole field. The measurement system is relatively simple and only an ordinary objective is enough to achieve imaging of the sample. Both theory and experiments are conducted in detail to demonstrate that the availability of this method.
Keywordthin films Fourier transform microscopy surface topography digital micro-mirror devices modulation
WOS KeywordSURFACES
Conference Name9th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT) - Meta-Surface-Wave and Planar Optics9th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT) - Meta-Surface-Wave and Planar Optics
Conference DateJUN 26-29, 2018JUN 26-29, 2018
Conference PlaceChengdu, PEOPLES R CHINAChengdu, PEOPLES R CHINA
Citation statistics
Cited Times:1[WOS]   [WOS Record]     [Related Records in WOS]
Document Type会议论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/9140
Collection微电子装备总体研究室(四室)
Recommended Citation
GB/T 7714
Xie, Zhongye,Tang, Yan,Liu, Xi,et al. Fast thickness measurement of thin films using two-dimensional Fourier transform-based structured illumination microscopy[C],2018:1084105.
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