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Model-free optical surface reconstruction from deflectometry data
Graves, L.R.1; Choi, H.1; Zhao, W.2; Oh, C.J.1; Su, P.3; Su, T.4,5; Kim, D.W.1
Indexed BySCI ; Ei
WOS IDWOS:000452438100026
EI Accession Number20184606080523
AbstractDeflectometry is a metrology method able to measure large surface slope ranges that can achieve surface reconstruction accuracy similar to interferometry, making it ideal for freeform metrology. While it is a non-null method, deflectometry previously required a precise model of the unit under test to accurately reconstruct the surface. However, there are times when no such model exists, such as during the grinding phase of an optic. We developed a model-free iterative data processing technique which provides improved deflectometry surface reconstruction of optics when the correct surface model is unknown. The new method iteratively reconstructs the optical surface, leading to a reduction in error in the final reconstructed surface. Software simulations measuring the theoretical performance limitations of the model-free processing technique as well as a real-world test characterizing actual performance were performed. The method was implemented in a deflectometry system and a highly freeform surface was measured and reconstructed using both the iterative technique and a traditional non-iterative technique. The results were compared to a commercial interferometric measurement of the optic. The reconstructed surface departure from interferometric results was reduced from 44.39 mu m RMS with traditional non-iterative deflectometry down to 5.20 mu m RMS with the model-free technique reported.
KeywordDeflectometry model-free metrology freeform
EI KeywordsData handling ; Interferometry ; Iterative methods ; Manufacture ; Measurement ; Software testing
Conference NameConference on Optical Manufacturing and Testing XIIConference on Optical Manufacturing and Testing XII
Conference DateAUG 20-22, 2018AUG 20-22, 2018
Conference PlaceSan Diego, CASan Diego, CA
EI Classification Number537.1 Heat Treatment Processes ; 723.2 Data Processing and Image Processing ; 723.5 Computer Applications ; 921.6 Numerical Methods ; 941.4 Optical Variables Measurements
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Document Type会议论文
Affiliation1.College of Optical Sciences, Univ. of Arizona, 1630 E. University Blvd, Tucson; AZ; 85721, United States;
2.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu; 610209, China;
3.ASML Corporation, 77 Danbury Road, Wilton; TC; 0689, United States;
4.KLA-Tencor Corporation, 3 Technology Dr, Miltipas; CA; 95035, United States;
5.Steward Observatory, University of Arizona, 933 N. Cherry Ave, Tucson; AZ; 85719, United States
Recommended Citation
GB/T 7714
Graves, L.R.,Choi, H.,Zhao, W.,et al. Model-free optical surface reconstruction from deflectometry data[C],2018:107420Y.
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2018-2157.pdf(699KB)会议论文 开放获取CC BY-NC-SAApplication Full Text
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