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Surface micromachined MEMS deformable mirror based on hexagonal parallel-plate electrostatic actuator
Ma, Wenying1; Ma, Changwei1; Wang, Weimin2
Source PublicationJournal of Physics Conference Series (IOP): 19TH ANNUAL CONFERENCE AND 8TH INTERNATIONAL CONFERENCE OF CHINESE SOCIETY OF MICRO/NANO TECHNOLOGY (CSMNT2017)
Volume986
Pages12021
2018
Language英语
ISSN1742-6588
DOI10.1088/1742-6596/986/1/012021
Indexed BySCI ; Ei
WOS IDWOS:000445813800021
EI Accession Number20181705045808
SubtypeC
AbstractDeformable mirrors (DM) based on microelectromechanical system (MEMS) technology are being applied in adaptive optics (AO) system for astronomical telescopes and human eyes more and more. In this paper a MEMS DM with hexagonal actuator is proposed and designed. The relationship between structural design and performance parameters, mainly actuator coupling, is analyzed carefully and calculated. The optimum value of actuator coupling is obtained. A 7-element DM prototype is fabricated using a commercial available standard three-layer poly silicon surface multi-user-MEMS-processes (PolyMUMPs). Some key performances, including surface figure and voltage-displacement curve, are measured through a 3D white light profiler. The measured performances are very consistent with the theoretical values. The proposed DM will benefit the miniaturization of AO systems and lower their cost.
KeywordAdaptive optics Deformation Delta modulation Electromechanical devices Laser pulses MEMS Mirrors Structural design Surface micromachining
EI KeywordsAdaptive optics ; Deformation ; Delta modulation ; Electromechanical devices ; Laser pulses ; MEMS ; Mirrors ; Structural design ; Surface micromachining
Conference Name19th Annual Conference and 8th International Conference of Chinese Society of Micro/Nano Technology (CSMNT)19th Annual Conference and 8th International Conference of Chinese Society of Micro/Nano Technology (CSMNT)
Conference DateOCT 26-29, 2017OCT 26-29, 2017
Conference PlaceDalian, PEOPLES R CHINADalian, PEOPLES R CHINA
EI Classification Number408.1 Structural Design, General ; 704.2 Electric Equipment ; 732.1 Control Equipment ; 741.1 Light/Optics ; 741.3 Optical Devices and Systems ; 744.1 Lasers, General ; 761 Nanotechnology
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Cited Times:4[WOS]   [WOS Record]     [Related Records in WOS]
Document Type会议论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/9123
Collection微细加工光学技术国家重点实验室(开放室)
Affiliation1.College of Communication Engineering, Chengdu University of Information Technology, Chengdu; 610225, China;
2.State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Science, Chengdu; 610209, China
Recommended Citation
GB/T 7714
Ma, Wenying,Ma, Changwei,Wang, Weimin. Surface micromachined MEMS deformable mirror based on hexagonal parallel-plate electrostatic actuator[C],2018:12021.
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