| Department | 微细加工光学技术国家重点实验室（开放室） |
| Surface micromachined MEMS deformable mirror based on hexagonal parallel-plate electrostatic actuator | |
| Ma, Wenying1; Ma, Changwei1; Wang, Weimin2 | |
| Source Publication | Journal of Physics Conference Series (IOP): 19TH ANNUAL CONFERENCE AND 8TH INTERNATIONAL CONFERENCE OF CHINESE SOCIETY OF MICRO/NANO TECHNOLOGY (CSMNT2017) |
| Volume | 986 |
| Pages | 12021 |
| 2018 | |
| Language | 英语 |
| ISSN | 1742-6588 |
| DOI | 10.1088/1742-6596/986/1/012021 |
| Indexed By | SCI ; Ei |
| WOS ID | WOS:000445813800021 |
| EI Accession Number | 20181705045808 |
| Subtype | C |
| Abstract | Deformable mirrors (DM) based on microelectromechanical system (MEMS) technology are being applied in adaptive optics (AO) system for astronomical telescopes and human eyes more and more. In this paper a MEMS DM with hexagonal actuator is proposed and designed. The relationship between structural design and performance parameters, mainly actuator coupling, is analyzed carefully and calculated. The optimum value of actuator coupling is obtained. A 7-element DM prototype is fabricated using a commercial available standard three-layer poly silicon surface multi-user-MEMS-processes (PolyMUMPs). Some key performances, including surface figure and voltage-displacement curve, are measured through a 3D white light profiler. The measured performances are very consistent with the theoretical values. The proposed DM will benefit the miniaturization of AO systems and lower their cost. |
| Keyword | Adaptive optics Deformation Delta modulation Electromechanical devices Laser pulses MEMS Mirrors Structural design Surface micromachining |
| EI Keywords | Adaptive optics ; Deformation ; Delta modulation ; Electromechanical devices ; Laser pulses ; MEMS ; Mirrors ; Structural design ; Surface micromachining |
| Conference Name | 19th Annual Conference and 8th International Conference of Chinese Society of Micro/Nano Technology (CSMNT)19th Annual Conference and 8th International Conference of Chinese Society of Micro/Nano Technology (CSMNT) |
| Conference Date | OCT 26-29, 2017OCT 26-29, 2017 |
| Conference Place | Dalian, PEOPLES R CHINADalian, PEOPLES R CHINA |
| EI Classification Number | 408.1 Structural Design, General ; 704.2 Electric Equipment ; 732.1 Control Equipment ; 741.1 Light/Optics ; 741.3 Optical Devices and Systems ; 744.1 Lasers, General ; 761 Nanotechnology |
| Citation statistics | |
| Document Type | 会议论文 |
| Identifier | http://ir.ioe.ac.cn/handle/181551/9123 |
| Collection | 微细加工光学技术国家重点实验室（开放室） |
| Affiliation | 1.College of Communication Engineering, Chengdu University of Information Technology, Chengdu; 610225, China; 2.State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Science, Chengdu; 610209, China |
| Recommended Citation GB/T 7714 | Ma, Wenying,Ma, Changwei,Wang, Weimin. Surface micromachined MEMS deformable mirror based on hexagonal parallel-plate electrostatic actuator[C],2018:12021. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 2018-2147.pdf（960KB） | 会议论文 | 开放获取 | CC BY-NC-SA | Application Full Text | ||
Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.
Edit Comment