Knowledge Management System Of Institute of optics and electronics, CAS
| A method of measuring the velocity of slit based on machine vision | |
| Chen, Man1,2; Liao, Zhijie1 | |
| 2017 | |
| Conference Name | Proceedings of SPIE: Seventh International Conference on Electronics and Information Engineering |
| Source Publication | 0277-786X |
| Volume | 10322 |
| Pages | 103222U |
| Abstract | In the lithography machine, there is a field diaphragm, which is a kind of edge structure. In the process of exposure, it is linearly synchronous movement with the die, so when developing the slit, it is necessary to measure its movement characteristics precisely. A method of velocity measurement based on machine vision is adopted, by detecting edge position in sequential images, and then through the transformation between image coordinate and world coordinate, the object displacement in real space is calculated and finally instantaneous velocity of the object is got. Firstly, through the simulation model in CODE V, correctness of the measurement principle is verified, Next, some error sources that affect the precision of the machine vision measurement system are analyzed, and corresponding solutions are given. © 2017 SPIE. |
| Keyword | Diaphragms - Error analysis |
| Indexed By | Ei |
| Language | 英语 |
| EI Classification Number | 2017-2175 |
| Document Type | 会议论文 |
| Identifier | http://ir.ioe.ac.cn/handle/181551/9043 |
| Collection | 空天部 |
| Affiliation | 1.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, Sichuan; 610209, China; 2.University of Chinese Academy of Sciences, Beijing; 100049, China |
| Recommended Citation GB/T 7714 | Chen, Man,Liao, Zhijie. A method of measuring the velocity of slit based on machine vision[C],2017:103222U. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 2017-2175.pdf（591KB） | 会议论文 | 开放获取 | CC BY-NC-SA | Application Full Text | ||
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