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A method of measuring the velocity of slit based on machine vision
Chen, Man1,2; Liao, Zhijie1
2017
会议名称Proceedings of SPIE: Seventh International Conference on Electronics and Information Engineering
会议录名称0277-786X
卷号10322
页码103222U
摘要In the lithography machine, there is a field diaphragm, which is a kind of edge structure. In the process of exposure, it is linearly synchronous movement with the die, so when developing the slit, it is necessary to measure its movement characteristics precisely. A method of velocity measurement based on machine vision is adopted, by detecting edge position in sequential images, and then through the transformation between image coordinate and world coordinate, the object displacement in real space is calculated and finally instantaneous velocity of the object is got. Firstly, through the simulation model in CODE V, correctness of the measurement principle is verified, Next, some error sources that affect the precision of the machine vision measurement system are analyzed, and corresponding solutions are given. © 2017 SPIE.
关键词Diaphragms - Error analysis
收录类别Ei
语种英语
EI分类号2017-2175
文献类型会议论文
条目标识符http://ir.ioe.ac.cn/handle/181551/9043
专题空天部
作者单位1.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, Sichuan; 610209, China;
2.University of Chinese Academy of Sciences, Beijing; 100049, China
推荐引用方式
GB/T 7714
Chen, Man,Liao, Zhijie. A method of measuring the velocity of slit based on machine vision[C],2017:103222U.
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