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A method of measuring the velocity of slit based on machine vision
Chen, Man1,2; Liao, Zhijie1
2017
Conference NameProceedings of SPIE: Seventh International Conference on Electronics and Information Engineering
Source Publication0277-786X
Volume10322
Pages103222U
AbstractIn the lithography machine, there is a field diaphragm, which is a kind of edge structure. In the process of exposure, it is linearly synchronous movement with the die, so when developing the slit, it is necessary to measure its movement characteristics precisely. A method of velocity measurement based on machine vision is adopted, by detecting edge position in sequential images, and then through the transformation between image coordinate and world coordinate, the object displacement in real space is calculated and finally instantaneous velocity of the object is got. Firstly, through the simulation model in CODE V, correctness of the measurement principle is verified, Next, some error sources that affect the precision of the machine vision measurement system are analyzed, and corresponding solutions are given. © 2017 SPIE.
KeywordDiaphragms - Error analysis
Indexed ByEi
Language英语
EI Classification Number2017-2175
Document Type会议论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/9043
Collection空天部
Affiliation1.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, Sichuan; 610209, China;
2.University of Chinese Academy of Sciences, Beijing; 100049, China
Recommended Citation
GB/T 7714
Chen, Man,Liao, Zhijie. A method of measuring the velocity of slit based on machine vision[C],2017:103222U.
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