| Effect of oxygen flux on stress and optical properties of Ta2O5 using Ion-beam sputtering | |
| Yu, Qi1,2,3; Fan, Jun-Qi1,2; Guan, Chun-Lin1,2 | |
| 2017 | |
| Conference Name | Proceedings of SPIE: Selected Papers of the Chinese Society for Optical Engineering Conferences held October and November 2016 |
| Source Publication | 0277-786X |
| Volume | 10255 |
| Pages | 102551E |
| Abstract | The ion-beam sputtering deposition is a good technique for making low scattering coatings. In this work, the Ta2O5thin films as the oxygen flux (15-35sccm) were prepared on the K9 glass using the single ion-beam sputtering. As the oxygen flux increased, the thickness of films with the same deposited time decreased from 936.67nm to 837.87nm. The refractive index was 2.075 in 1000nm at 30 sccm. The stress increased along with the increasing of oxygen flux. In the work, the compressive stress increased from 319.55 Mpa to 410.92 Mpa. © 2017 SPIE. |
| Keyword | Compressive stress - Ion beams - Ions - Optical properties - Oxygen - Refractive index - Sputtering - Stresses - Tantalum oxides - Thin films |
| Indexed By | Ei |
| Language | 英语 |
| EI Classification Number | 2017-2171 |
| Document Type | 会议论文 |
| Identifier | http://ir.ioe.ac.cn/handle/181551/9039 |
| Collection | 自适应光学技术研究室（八室） |
| Affiliation | 1.Key Laboratory of Adaptive Optics, Chinese Academy of Science, Chengdu Sichuan; 610209, China; 2.Institute of Optics and Electronics, Chinese Academy of Science, Chengdu Sichuan; 610209, China; 3.University of Chinese Academy of Science, Beijing; 100049, China |
| Recommended Citation GB/T 7714 | Yu, Qi,Fan, Jun-Qi,Guan, Chun-Lin. Effect of oxygen flux on stress and optical properties of Ta2O5 using Ion-beam sputtering[C],2017:102551E. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 2017-2171.pdf（293KB） | 会议论文 | 开放获取 | CC BY-NC-SA | Application Full Text | ||
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