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An optimized method to calculate error correction capability of tool influence function in frequency domain
Wang, Jia; Hou, Xi; Wan, Yongjian; Shi, Chunyan
Source Publication0277-786X
Volume10448
Pages104481Z
2017
Language英语
Indexed ByEi
AbstractAn optimized method to calculate error correction capability of tool influence function (TIF) in certain polishing conditions will be proposed based on smoothing spectral function. The basic mathematical model for this method will be established in theory. A set of polishing experimental data with rigid conformal tool is used to validate the optimized method. The calculated results can quantitatively indicate error correction capability of TIF for different spatial frequency errors in certain polishing conditions. The comparative analysis with previous method shows that the optimized method is simpler in form and can get the same accuracy results with less calculating time in contrast to previous method. Copyright © 2017 SPIE.
KeywordCodes (symbols) - Error correction - Frequency domain analysis - Method of moments - Polishing - Power spectral density - Spectral density
Conference NameProceedings of SPIE: Optifab 2017
EI Classification Number2017-2167
Document Type会议论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/9035
Collection先光中心
AffiliationInstitute of Optics and Electronics, Chinese Academy of Sciences, Chengdu; 610209, China
Recommended Citation
GB/T 7714
Wang, Jia,Hou, Xi,Wan, Yongjian,et al. An optimized method to calculate error correction capability of tool influence function in frequency domain[C],2017:104481Z.
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