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An optimized method to calculate error correction capability of tool influence function in frequency domain
Wang, Jia; Hou, Xi; Wan, Yongjian; Shi, Chunyan
2017
会议名称Proceedings of SPIE: Optifab 2017
会议录名称0277-786X
卷号10448
页码104481Z
摘要An optimized method to calculate error correction capability of tool influence function (TIF) in certain polishing conditions will be proposed based on smoothing spectral function. The basic mathematical model for this method will be established in theory. A set of polishing experimental data with rigid conformal tool is used to validate the optimized method. The calculated results can quantitatively indicate error correction capability of TIF for different spatial frequency errors in certain polishing conditions. The comparative analysis with previous method shows that the optimized method is simpler in form and can get the same accuracy results with less calculating time in contrast to previous method. Copyright © 2017 SPIE.
关键词Codes (symbols) - Error correction - Frequency domain analysis - Method of moments - Polishing - Power spectral density - Spectral density
收录类别Ei
语种英语
EI分类号2017-2167
文献类型会议论文
条目标识符http://ir.ioe.ac.cn/handle/181551/9035
专题先光中心
作者单位Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu; 610209, China
推荐引用方式
GB/T 7714
Wang, Jia,Hou, Xi,Wan, Yongjian,et al. An optimized method to calculate error correction capability of tool influence function in frequency domain[C],2017:104481Z.
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