IOE OpenIR  > 超精总体部
Etching hard brittle optical materials by masked ion beam
Li, Yun; Fu, Taotao; Jia, Xin; Xing, Tingwen
Source Publication0277-786X
Volume10448
Pages1044809
2017
Language英语
Indexed ByEi
AbstractThe fabrication of small size aspheric optical surface, which made of hard brittle materials, usually uses optical cold processing. However, it is difficult to achieve the ideal requirements of the surface accuracy and roughness. In order to solve this problem, the masked ion beam figuring method is used to etch the one-dimension structure on the plat surface which made of hard brittle material. The results show that the expected surface profile is acquired and meanwhile mainly kept the original roughness and mid-frequency. It provides a possible way for fabricating small size aspheric optics which made of hard brittle materials. Copyright © 2017 SPIE.
KeywordBrittleness - Ions - Masks - Surface roughness
Conference NameProceedings of SPIE: Optifab 2017
EI Classification Number2017-2165
Document Type会议论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/9033
Collection超精总体部
AffiliationInstitute of Optics and Electronics, Chinese Academy of Sciences, Chengdu; 610209, China
Recommended Citation
GB/T 7714
Li, Yun,Fu, Taotao,Jia, Xin,et al. Etching hard brittle optical materials by masked ion beam[C],2017:1044809.
Files in This Item:
File Name/Size DocType Version Access License
2017-2165.pdf(339KB)会议论文 开放获取CC BY-NC-SAApplication Full Text
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[Li, Yun]'s Articles
[Fu, Taotao]'s Articles
[Jia, Xin]'s Articles
Baidu academic
Similar articles in Baidu academic
[Li, Yun]'s Articles
[Fu, Taotao]'s Articles
[Jia, Xin]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[Li, Yun]'s Articles
[Fu, Taotao]'s Articles
[Jia, Xin]'s Articles
Terms of Use
No data!
Social Bookmark/Share
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.