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Etching hard brittle optical materials by masked ion beam
Li, Yun; Fu, Taotao; Jia, Xin; Xing, Tingwen
2017
会议名称Proceedings of SPIE: Optifab 2017
会议录名称0277-786X
卷号10448
页码1044809
摘要The fabrication of small size aspheric optical surface, which made of hard brittle materials, usually uses optical cold processing. However, it is difficult to achieve the ideal requirements of the surface accuracy and roughness. In order to solve this problem, the masked ion beam figuring method is used to etch the one-dimension structure on the plat surface which made of hard brittle material. The results show that the expected surface profile is acquired and meanwhile mainly kept the original roughness and mid-frequency. It provides a possible way for fabricating small size aspheric optics which made of hard brittle materials. Copyright © 2017 SPIE.
关键词Brittleness - Ions - Masks - Surface roughness
收录类别Ei
语种英语
EI分类号2017-2165
文献类型会议论文
条目标识符http://ir.ioe.ac.cn/handle/181551/9033
专题超精密总体部
作者单位Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu; 610209, China
推荐引用方式
GB/T 7714
Li, Yun,Fu, Taotao,Jia, Xin,et al. Etching hard brittle optical materials by masked ion beam[C],2017:1044809.
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