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Dynamic metrology and data processing for precision freeform optics fabrication and testing
Aftab, Maham1; Trumper, Isaac1; Huang, Lei2; Choi, Heejoo1; Zhao, Wenchuan3; Graves, Logan1; Oh, Chang Jin1; Kim, Dae Wook1,4
Source Publication0277-786X
Volume10326
Pages103260H
2017
Language英语
Indexed ByEi
AbstractDynamic metrology holds the key to overcoming several challenging limitations of conventional optical metrology, especially with regards to precision freeform optical elements. We present two dynamic metrology systems: 1) adaptive interferometric null testing; and 2) instantaneous phase shifting deflectometry, along with an overview of a gradient data processing and surface reconstruction technique. The adaptive null testing method, utilizing a deformable mirror, adopts a stochastic parallel gradient descent search algorithm in order to dynamically create a null testing condition for unknown freeform optics. The single-shot deflectometry system implemented on an iPhone uses a multiplexed display pattern to enable dynamic measurements of time-varying optical components or optics in vibration. Experimental data, measurement accuracy / precision, and data processing algorithms are discussed. © 2017 SPIE.
KeywordAdaptive optics - Data processing - Gradient methods - Manufacture - Measurements - Optical systems - Optical testing - Stochastic systems - Units of measurement
Conference NameProceedings of SPIE: Fourth European Seminar on Precision Optics Manufacturing
EI Classification Number2017-2163
Document Type会议论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/9031
Collection先光中心
Affiliation1.College of Optical Sciences, University of Arizona, Tucson; AZ; 85721, United States;
2.Department of Precision Instruments, Tsinghua University, Beijing; 100084, China;
3.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu; 610209, China;
4.Steward Observatory, University of Arizona, Tucson; AZ; 85721, United States
Recommended Citation
GB/T 7714
Aftab, Maham,Trumper, Isaac,Huang, Lei,et al. Dynamic metrology and data processing for precision freeform optics fabrication and testing[C],2017:103260H.
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