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Dynamic metrology and data processing for precision freeform optics fabrication and testing
Aftab, Maham1; Trumper, Isaac1; Huang, Lei2; Choi, Heejoo1; Zhao, Wenchuan3; Graves, Logan1; Oh, Chang Jin1; Kim, Dae Wook1,4
2017
会议名称Proceedings of SPIE: Fourth European Seminar on Precision Optics Manufacturing
会议录名称0277-786X
卷号10326
页码103260H
摘要Dynamic metrology holds the key to overcoming several challenging limitations of conventional optical metrology, especially with regards to precision freeform optical elements. We present two dynamic metrology systems: 1) adaptive interferometric null testing; and 2) instantaneous phase shifting deflectometry, along with an overview of a gradient data processing and surface reconstruction technique. The adaptive null testing method, utilizing a deformable mirror, adopts a stochastic parallel gradient descent search algorithm in order to dynamically create a null testing condition for unknown freeform optics. The single-shot deflectometry system implemented on an iPhone uses a multiplexed display pattern to enable dynamic measurements of time-varying optical components or optics in vibration. Experimental data, measurement accuracy / precision, and data processing algorithms are discussed. © 2017 SPIE.
关键词Adaptive optics - Data processing - Gradient methods - Manufacture - Measurements - Optical systems - Optical testing - Stochastic systems - Units of measurement
收录类别Ei
语种英语
EI分类号2017-2163
文献类型会议论文
条目标识符http://ir.ioe.ac.cn/handle/181551/9031
专题先光中心
作者单位1.College of Optical Sciences, University of Arizona, Tucson; AZ; 85721, United States;
2.Department of Precision Instruments, Tsinghua University, Beijing; 100084, China;
3.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu; 610209, China;
4.Steward Observatory, University of Arizona, Tucson; AZ; 85721, United States
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GB/T 7714
Aftab, Maham,Trumper, Isaac,Huang, Lei,et al. Dynamic metrology and data processing for precision freeform optics fabrication and testing[C],2017:103260H.
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