Dimensional metrology of micro structure based on modulation depth in scanning broadband light interferometry

	Dimensional metrology of micro structure based on modulation depth in scanning broadband light interferometry
	Zhou, Yi 1,2; Tang, Yan 1; Deng, Qinyuan 1,2; Zhao, Lixin 1; Hu, Song 1
	2017
会议名称	Proceedings of SPIE: Applied Optical Metrology II
会议录名称	0277-786X
卷号	10373
页码	103730G
摘要	Three-dimensional measurement and inspection is an area with growing needs and interests in many domains, such as integrated circuits (IC), medical cure, and chemistry. Among the methods, broadband light interferometry is widely utilized due to its large measurement range, noncontact and high precision. In this paper, we propose a spatial modulation depth-based method to retrieve the surface topography through analyzing the characteristics of both frequency and spatial domains in the interferogram. Due to the characteristics of spatial modulation depth, the technique could effectively suppress the negative influences caused by light fluctuations and external disturbance. Both theory and experiments are elaborated to confirm that the proposed method can greatly improve the measurement stability and sensitivity with high precision. This technique can achieve a superior robustness with the potential to be applied in online topography measurement. © 2017 SPIE.
关键词	Microstructure - Modulation - Surface topography - Units of measurement
收录类别	Ei
语种	英语
EI分类号	2017-2159
文献类型	会议论文
条目标识符	http://ir.ioe.ac.cn/handle/181551/9027
专题	微电子装备总体研究室（四室）
作者单位	1.State Key Lab. of Optical Technol. for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu; 610209, China; 2.University of Chinese Academy of Sciences, Beijing; 100049, China
推荐引用方式 GB/T 7714	Zhou, Yi,Tang, Yan,Deng, Qinyuan,et al. Dimensional metrology of micro structure based on modulation depth in scanning broadband light interferometry[C],2017:103730G.

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