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Dimensional metrology of micro structure based on modulation depth in scanning broadband light interferometry
Zhou, Yi1,2; Tang, Yan1; Deng, Qinyuan1,2; Zhao, Lixin1; Hu, Song1
Source Publication0277-786X
Volume10373
Pages103730G
2017
Language英语
Indexed ByEi
AbstractThree-dimensional measurement and inspection is an area with growing needs and interests in many domains, such as integrated circuits (IC), medical cure, and chemistry. Among the methods, broadband light interferometry is widely utilized due to its large measurement range, noncontact and high precision. In this paper, we propose a spatial modulation depth-based method to retrieve the surface topography through analyzing the characteristics of both frequency and spatial domains in the interferogram. Due to the characteristics of spatial modulation depth, the technique could effectively suppress the negative influences caused by light fluctuations and external disturbance. Both theory and experiments are elaborated to confirm that the proposed method can greatly improve the measurement stability and sensitivity with high precision. This technique can achieve a superior robustness with the potential to be applied in online topography measurement. © 2017 SPIE.
KeywordMicrostructure - Modulation - Surface topography - Units of measurement
Conference NameProceedings of SPIE: Applied Optical Metrology II
EI Classification Number2017-2159
Document Type会议论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/9027
Collection微电子装备总体研究室(四室)
Affiliation1.State Key Lab. of Optical Technol. for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu; 610209, China;
2.University of Chinese Academy of Sciences, Beijing; 100049, China
Recommended Citation
GB/T 7714
Zhou, Yi,Tang, Yan,Deng, Qinyuan,et al. Dimensional metrology of micro structure based on modulation depth in scanning broadband light interferometry[C],2017:103730G.
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