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缓冲层和保护层提高激光增透膜损伤阈值
张蕾1,2; 刘洪祥1; 陈光1; 高卫东1
Source Publication光电工程
Volume43Issue:7Pages:89-94
2016
Language中文
Abstract为提高离子束溅射制备1 064 nm、532 nm双波长增透膜抗激光损伤阈值,分别在靠近基板、空气侧加镀一定厚度二氧化硅膜层,研究缓冲层、保护层对增透膜抗激光损伤阈值的影响。依据ISO21254-2损伤测试标准,测试不同膜系结构增透膜抗1 064 nm波长激光损伤阈值。实验结果表明,二氧化硅缓冲层提高增透膜抗激光损伤阈值约65.4%;二氧化硅保护层提高增透膜抗激光损伤阈值约66.7%;同时加镀缓冲层、保护层增透膜抗激光损伤阈值显著提高约118%。
Keyword缓冲层 保护层 激光增透膜 损伤阈值
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/9006
Collection薄膜光学技术研究室(十一室)
Affiliation1.中国科学院光电技术研究所,成都610209;
2.中国科学院大学,北京100049
First Author AffilicationInstitute of optics and electronics, CAS
Recommended Citation
GB/T 7714
张蕾,刘洪祥,陈光,等. 缓冲层和保护层提高激光增透膜损伤阈值[J]. 光电工程,2016,43(7):89-94.
APA 张蕾,刘洪祥,陈光,&高卫东.(2016).缓冲层和保护层提高激光增透膜损伤阈值.光电工程,43(7),89-94.
MLA 张蕾,et al."缓冲层和保护层提高激光增透膜损伤阈值".光电工程 43.7(2016):89-94.
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