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基于塔尔博特自成像光刻机的照明系统设计与分析
佟军民; 刘俊伯; 胡松
2017
Source Publication激光与光电子学进展
ISSN1006-4125
Volume54Issue:8Pages:260-268
Language中文
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/8959
Collection微电子装备总体研究室(四室)
Recommended Citation
GB/T 7714
佟军民,刘俊伯,胡松. 基于塔尔博特自成像光刻机的照明系统设计与分析[J]. 激光与光电子学进展,2017,54(8):260-268.
APA 佟军民,刘俊伯,&胡松.(2017).基于塔尔博特自成像光刻机的照明系统设计与分析.激光与光电子学进展,54(8),260-268.
MLA 佟军民,et al."基于塔尔博特自成像光刻机的照明系统设计与分析".激光与光电子学进展 54.8(2017):260-268.
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