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白光干涉检测仪垂直扫描系统设计
姚靖威; 唐燕; 周毅; 邓茜; 赵立新; 胡松
2017
Source Publication半导体技术
ISSN1003-353X
Volume42Issue:3Pages:229-234
Language中文
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/8907
Collection微电子装备总体研究室(四室)
Recommended Citation
GB/T 7714
姚靖威,唐燕,周毅,等. 白光干涉检测仪垂直扫描系统设计[J]. 半导体技术,2017,42(3):229-234.
APA 姚靖威,唐燕,周毅,邓茜,赵立新,&胡松.(2017).白光干涉检测仪垂直扫描系统设计.半导体技术,42(3),229-234.
MLA 姚靖威,et al."白光干涉检测仪垂直扫描系统设计".半导体技术 42.3(2017):229-234.
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