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SiNx thickness dependence of spectral properties and durability of protected-silver mirrors
Xu, Xu1,2; He, Wenyan1,2; Wang, Changjun1; Wei, Ming1; Li, Bincheng1,3
Source PublicationSurface and Coatings Technology
Volume324Pages:175-181
2017
Language英语
ISSN0257-8972
Indexed BySCI ; Ei
AbstractBoth long-term environmental durability and high broadband reflectance of protected-silver mirrors are of great importance to the developments of optical instruments for a variety of applications under harsh environments. In this paper, the dependences of spectral properties and environmental durability of protected-silver mirrors with a Sub/NiCrNx/Ag/NiCrNx/SiNx/Air structure on thickness of SiNxprotective layer were investigated in details. The reflectance, transmittance, total scattering loss measurements and scanning electron microscope (SEM) imaging were employed to characterize the spectral properties and surface morphology, and accelerated environmental tests, including humidity test and salt fog test, were applied to investigate the environmental durability. Five magnetron-sputtering prepared protected-silver mirrors with SiNxlayer thicknesses between 8 nm to 16 nm were tested. The results showed that both optical and corrosion-resistant properties of protected-silver mirrors were SiNxthickness dependent and the optimum SiNxthickness should be approximately 14 nm for Sub/NiCrNx/Ag/NiCrNx/SiNx/Air protected-silver mirrors to have both reasonably high reflectance in the visible spectral range and high corrosion resistance for long lifetime applications in harsh environments. © 2017 Elsevier B.V.
KeywordCorrosion - Corrosion resistance - Environmental testing - Mirrors - Protective coatings - Reflection - Scanning electron microscopy - Silicon nitride - Silver
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/8899
Collection薄膜光学技术研究室(十一室)
Affiliation1.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu; 610209, China;
2.Graduate School of the Chinese Academy of Sciences, Beijing; 100039, China;
3.School of Optoelectronic Information, University of Electronic Science and Technology of China, Chengdu; 610054, China
Recommended Citation
GB/T 7714
Xu, Xu,He, Wenyan,Wang, Changjun,et al. SiNx thickness dependence of spectral properties and durability of protected-silver mirrors[J]. Surface and Coatings Technology,2017,324:175-181.
APA Xu, Xu,He, Wenyan,Wang, Changjun,Wei, Ming,&Li, Bincheng.(2017).SiNx thickness dependence of spectral properties and durability of protected-silver mirrors.Surface and Coatings Technology,324,175-181.
MLA Xu, Xu,et al."SiNx thickness dependence of spectral properties and durability of protected-silver mirrors".Surface and Coatings Technology 324(2017):175-181.
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