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Study on defects in ZnS/YbF3infrared coatings on silicon substrates
Zhang, Yinhua1,2; Xiong, Shengming1; Huang, Wei1
2017
Source PublicationSurface and Coatings Technology
ISSN0257-8972
Volume320Pages:3-6
AbstractIn order to reduce the numbers of defects, the influence of deposition parameters (i.e., deposition rate and substrate temperature) and deposition methods (i.e., thermal evaporation and electron beam evaporation) on the defect density of ZnS monolayer, YbF3monolayer and ZnS/YbF3multilayer coatings deposited on silicon substrates were investigated experimentally. The results show that deposition rate and substrate temperature have major influence on the defect density. For ZnS monolayer coatings, the optimum deposition rate is approximately 1.2 nm/s, and the optimum substrate temperature is from 80 °C to 120 °C. Meanwhile, for YbF3monolayer coatings, the optimum deposition rate is approximately 0.4 nm/s, and the optimum substrate temperature is from 100 °C to 150 °C. Furthermore, the defect density of ZnS or YbF3monolayer coatings deposited by thermal evaporation is much lower than that by electron beam evaporation. The defect density of ZnS/YbF3multilayer coatings can be reduced significantly by optimizing the substrate temperature and deposition rate with the method of thermal evaporation. © 2017 Elsevier B.V.
KeywordCoatings - Defect density - Defects - Deposition - Deposition rates - Electron beams - Evaporation - Monolayers - Multilayers - Physical vapor deposition - Thermal evaporation - Zinc sulfide
Indexed BySCI ; Ei
Language英语
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/8898
Collection薄膜光学技术研究室(十一室)
Affiliation1.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu; Sichuan; 610209, China;
2.University of Chinese Academy of Science, Beijing; 100049, China
Recommended Citation
GB/T 7714
Zhang, Yinhua,Xiong, Shengming,Huang, Wei. Study on defects in ZnS/YbF3infrared coatings on silicon substrates[J]. Surface and Coatings Technology,2017,320:3-6.
APA Zhang, Yinhua,Xiong, Shengming,&Huang, Wei.(2017).Study on defects in ZnS/YbF3infrared coatings on silicon substrates.Surface and Coatings Technology,320,3-6.
MLA Zhang, Yinhua,et al."Study on defects in ZnS/YbF3infrared coatings on silicon substrates".Surface and Coatings Technology 320(2017):3-6.
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