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Study on defects in ZnS/YbF3infrared coatings on silicon substrates
Zhang, Yinhua1,2; Xiong, Shengming1; Huang, Wei1
2017
发表期刊Surface and Coatings Technology
ISSN0257-8972
卷号320页码:3-6
摘要In order to reduce the numbers of defects, the influence of deposition parameters (i.e., deposition rate and substrate temperature) and deposition methods (i.e., thermal evaporation and electron beam evaporation) on the defect density of ZnS monolayer, YbF3monolayer and ZnS/YbF3multilayer coatings deposited on silicon substrates were investigated experimentally. The results show that deposition rate and substrate temperature have major influence on the defect density. For ZnS monolayer coatings, the optimum deposition rate is approximately 1.2 nm/s, and the optimum substrate temperature is from 80 °C to 120 °C. Meanwhile, for YbF3monolayer coatings, the optimum deposition rate is approximately 0.4 nm/s, and the optimum substrate temperature is from 100 °C to 150 °C. Furthermore, the defect density of ZnS or YbF3monolayer coatings deposited by thermal evaporation is much lower than that by electron beam evaporation. The defect density of ZnS/YbF3multilayer coatings can be reduced significantly by optimizing the substrate temperature and deposition rate with the method of thermal evaporation. © 2017 Elsevier B.V.
关键词Coatings - Defect density - Defects - Deposition - Deposition rates - Electron beams - Evaporation - Monolayers - Multilayers - Physical vapor deposition - Thermal evaporation - Zinc sulfide
收录类别SCI ; Ei
语种英语
文献类型期刊论文
条目标识符http://ir.ioe.ac.cn/handle/181551/8898
专题薄膜光学技术研究室(十一室)
作者单位1.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu; Sichuan; 610209, China;
2.University of Chinese Academy of Science, Beijing; 100049, China
推荐引用方式
GB/T 7714
Zhang, Yinhua,Xiong, Shengming,Huang, Wei. Study on defects in ZnS/YbF3infrared coatings on silicon substrates[J]. Surface and Coatings Technology,2017,320:3-6.
APA Zhang, Yinhua,Xiong, Shengming,&Huang, Wei.(2017).Study on defects in ZnS/YbF3infrared coatings on silicon substrates.Surface and Coatings Technology,320,3-6.
MLA Zhang, Yinhua,et al."Study on defects in ZnS/YbF3infrared coatings on silicon substrates".Surface and Coatings Technology 320(2017):3-6.
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