| Study on defects in ZnS/YbF3infrared coatings on silicon substrates | |
| Zhang, Yinhua1,2; Xiong, Shengming1; Huang, Wei1 | |
| 2017 | |
| Source Publication | Surface and Coatings Technology
 |
| ISSN | 0257-8972 |
| Volume | 320Pages:3-6 |
| Abstract | In order to reduce the numbers of defects, the influence of deposition parameters (i.e., deposition rate and substrate temperature) and deposition methods (i.e., thermal evaporation and electron beam evaporation) on the defect density of ZnS monolayer, YbF3monolayer and ZnS/YbF3multilayer coatings deposited on silicon substrates were investigated experimentally. The results show that deposition rate and substrate temperature have major influence on the defect density. For ZnS monolayer coatings, the optimum deposition rate is approximately 1.2 nm/s, and the optimum substrate temperature is from 80 °C to 120 °C. Meanwhile, for YbF3monolayer coatings, the optimum deposition rate is approximately 0.4 nm/s, and the optimum substrate temperature is from 100 °C to 150 °C. Furthermore, the defect density of ZnS or YbF3monolayer coatings deposited by thermal evaporation is much lower than that by electron beam evaporation. The defect density of ZnS/YbF3multilayer coatings can be reduced significantly by optimizing the substrate temperature and deposition rate with the method of thermal evaporation. © 2017 Elsevier B.V. |
| Keyword | Coatings - Defect density - Defects - Deposition - Deposition rates - Electron beams - Evaporation - Monolayers - Multilayers - Physical vapor deposition - Thermal evaporation - Zinc sulfide |
| Indexed By | SCI ; Ei |
| Language | 英语 |
| Document Type | 期刊论文 |
| Identifier | http://ir.ioe.ac.cn/handle/181551/8898 |
| Collection | 薄膜光学技术研究室（十一室） |
| Affiliation | 1.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu; Sichuan; 610209, China; 2.University of Chinese Academy of Science, Beijing; 100049, China |
| Recommended Citation GB/T 7714 | Zhang, Yinhua,Xiong, Shengming,Huang, Wei. Study on defects in ZnS/YbF3infrared coatings on silicon substrates[J]. Surface and Coatings Technology,2017,320:3-6. |
| APA | Zhang, Yinhua,Xiong, Shengming,&Huang, Wei.(2017).Study on defects in ZnS/YbF3infrared coatings on silicon substrates.Surface and Coatings Technology,320,3-6. |
| MLA | Zhang, Yinhua,et al."Study on defects in ZnS/YbF3infrared coatings on silicon substrates".Surface and Coatings Technology 320(2017):3-6. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 2017-2138.pdf（315KB） | 期刊论文 | 出版稿 | 开放获取 | CC BY-NC-SA | Application Full Text | |
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