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Pulse stretcher with two beamsplitting elements for excimer laser pulses
Wang, Qiang1; Han, Yanling1; Liu, Cunding1,2; Li, Bincheng1,3
Source PublicationReview of Scientific Instruments
Volume88Issue:12Pages:123113
2017
Language英语
ISSN0034-6748
AbstractA pulse stretcher with two beamsplitting elements and an optical ring cavity is proposed. With a two-beamsplitting-element configuration, the temporal profile of the stretched output pulse is effectively improved, and the transient peak power is significantly reduced. By optimizing the radius of curvature of the concave mirrors used in the ring cavity, the spatial profile of the stretched pulse is kept nearly unchanged. The performance of the pulse stretcher is experimentally investigated with a 193 nm excimer laser. By optimizing the splitting ratios of the two beamsplitting elements, the pulse width is extended from 15.5 ns to 46.2 ns with a stretching ratio of 2.89; the transient peak power of the stretched pulse is reduced to 27% of that of the input laser pulse; an energy transmission efficiency of 87.8% is achieved for the proposed pulse stretcher with two beamsplitting elements. © 2017 Author(s).
KeywordExcimer lasers - Laser pulses - Mirrors
Indexed BySCI ; Ei
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/8883
Collection光电工程总体研究室(一室)
Affiliation1.Institute of Optics and Electronics, Chinese Academy of Sciences, Shuangliu, Chengdu; 610209, China;
2.Graduate University, Chinese Academy of Sciences, Beijing 100049, China;
3.School of Optoelectronic Information, University of Electronic Science and Technology of China, Chengdu; 610054, China
Recommended Citation
GB/T 7714
Wang, Qiang,Han, Yanling,Liu, Cunding,et al. Pulse stretcher with two beamsplitting elements for excimer laser pulses[J]. Review of Scientific Instruments,2017,88(12):123113.
APA Wang, Qiang,Han, Yanling,Liu, Cunding,&Li, Bincheng.(2017).Pulse stretcher with two beamsplitting elements for excimer laser pulses.Review of Scientific Instruments,88(12),123113.
MLA Wang, Qiang,et al."Pulse stretcher with two beamsplitting elements for excimer laser pulses".Review of Scientific Instruments 88.12(2017):123113.
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