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MEMS-based filter integrating tunable Fabry–Perot cavity and grating
Shi, Zhendong1; Fang, Liang2; Zhong, Libo2
Source PublicationOptics Communications
Indexed BySCI ; Ei
AbstractWe present a novel Micro-Electro-Mechanical-Systems (MEMS) filter integrating a tunable Fabry–Perot cavity and a grating (FP-G). It fuses the functions of the Fabry–Perot (FP) cavity and grating into a single device so as to realize both narrow spectral linewidth given by FP cavity and wide spectral range given by grating. A MEMS FP-G filter with 200μm cavity length was designed and fabricated. It is based on a W-shaped-section micro-bridge structure by which the electrostatic actuator is independent on the FP cavity and a long cavity length can be configured. A grating etched in the back of a cavity mirror serves to spatially separate the transmitted spectral lines corresponding to different interference orders of FP cavity. Experimental results indicated that the MEMS FP-G filter obtained a broader operation spectral range compared with the traditional MEMS FP filter, and achieved 1.2 nm spectral linewidth, which could be narrower by improving the effective finesse of the FP cavity in the fabrication process. Compared with the simulation results, there was considerable room for improvement in device performance by the optimal technique. © 2017 Elsevier B.V.
KeywordBandpass filters - Diffraction gratings - Electrostatic actuators - Microelectromechanical devices - Optical filters
Document Type期刊论文
Affiliation1.Southwest Institute of Technical Physics, Chengdu; 610041, China;
2.Institute of Optics and Electronics, Chinese Academy of Science, Chengdu; 610209, China
Recommended Citation
GB/T 7714
Shi, Zhendong,Fang, Liang,Zhong, Libo. MEMS-based filter integrating tunable Fabry–Perot cavity and grating[J]. Optics Communications,2017,402:472-477.
APA Shi, Zhendong,Fang, Liang,&Zhong, Libo.(2017).MEMS-based filter integrating tunable Fabry–Perot cavity and grating.Optics Communications,402,472-477.
MLA Shi, Zhendong,et al."MEMS-based filter integrating tunable Fabry–Perot cavity and grating".Optics Communications 402(2017):472-477.
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