IOE OpenIR  > 自适应光学技术研究室(八室)
MEMS-based filter integrating tunable Fabry–Perot cavity and grating
Shi, Zhendong1; Fang, Liang2; Zhong, Libo2
Source PublicationOptics Communications
Volume402Pages:472-477
2017
Language英语
ISSN0030-4018
Indexed BySCI ; Ei
AbstractWe present a novel Micro-Electro-Mechanical-Systems (MEMS) filter integrating a tunable Fabry–Perot cavity and a grating (FP-G). It fuses the functions of the Fabry–Perot (FP) cavity and grating into a single device so as to realize both narrow spectral linewidth given by FP cavity and wide spectral range given by grating. A MEMS FP-G filter with 200μm cavity length was designed and fabricated. It is based on a W-shaped-section micro-bridge structure by which the electrostatic actuator is independent on the FP cavity and a long cavity length can be configured. A grating etched in the back of a cavity mirror serves to spatially separate the transmitted spectral lines corresponding to different interference orders of FP cavity. Experimental results indicated that the MEMS FP-G filter obtained a broader operation spectral range compared with the traditional MEMS FP filter, and achieved 1.2 nm spectral linewidth, which could be narrower by improving the effective finesse of the FP cavity in the fabrication process. Compared with the simulation results, there was considerable room for improvement in device performance by the optimal technique. © 2017 Elsevier B.V.
KeywordBandpass filters - Diffraction gratings - Electrostatic actuators - Microelectromechanical devices - Optical filters
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/8860
Collection自适应光学技术研究室(八室)
Affiliation1.Southwest Institute of Technical Physics, Chengdu; 610041, China;
2.Institute of Optics and Electronics, Chinese Academy of Science, Chengdu; 610209, China
Recommended Citation
GB/T 7714
Shi, Zhendong,Fang, Liang,Zhong, Libo. MEMS-based filter integrating tunable Fabry–Perot cavity and grating[J]. Optics Communications,2017,402:472-477.
APA Shi, Zhendong,Fang, Liang,&Zhong, Libo.(2017).MEMS-based filter integrating tunable Fabry–Perot cavity and grating.Optics Communications,402,472-477.
MLA Shi, Zhendong,et al."MEMS-based filter integrating tunable Fabry–Perot cavity and grating".Optics Communications 402(2017):472-477.
Files in This Item:
File Name/Size DocType Version Access License
2017-2100.pdf(2119KB)期刊论文出版稿开放获取CC BY-NC-SAApplication Full Text
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[Shi, Zhendong]'s Articles
[Fang, Liang]'s Articles
[Zhong, Libo]'s Articles
Baidu academic
Similar articles in Baidu academic
[Shi, Zhendong]'s Articles
[Fang, Liang]'s Articles
[Zhong, Libo]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[Shi, Zhendong]'s Articles
[Fang, Liang]'s Articles
[Zhong, Libo]'s Articles
Terms of Use
No data!
Social Bookmark/Share
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.