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Dimensional metrology of smooth micro structures utilizing the spatial modulation of white-light interference fringes
Zhou, Yi1,2; Tang, Yan1; Deng, Qinyuan1,2; Liu, Junbo1; Wang, Jian1; Zhao, Lixin1
2017
发表期刊Optics and Laser Technology
ISSN0030-3992
卷号93页码:187-193
摘要Dimensional metrology for micro structure plays an important role in addressing quality issues and observing the performance of micro-fabricated products. In white light interferometry, the proposed method is expected to measure three-dimensional topography through modulation depth in spatial frequency domain. A normalized modulation depth is first obtained in the xy plane (image plane) for each CCD image individually. After that, the modulation depth of each pixel is analyzed along the scanning direction (z-axis) to reshape the topography of micro samples. Owing to the characteristics of modulation depth in broadband light interferometry, the method could effectively suppress the negative influences caused by light fluctuations and external irradiance disturbance. Both theory and experiments are elaborated in detail to verify that the modulation depth-based method can greatly level up the stability and sensitivity with satisfied precision in the measurement system. This technique can achieve an improved robustness in a complex measurement environment with the potential to be applied in online topography measurement such as chemistry and medical domains. © 2017
关键词Frequency domain analysis - Interferometry - Microstructure - Phase measurement - System stability - Topography - Units of measurement
收录类别SCI ; Ei
语种英语
文献类型期刊论文
条目标识符http://ir.ioe.ac.cn/handle/181551/8855
专题微电子装备总体研究室(四室)
作者单位1.State Key Laboratory of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu; Sichuan; 610209, China;
2.University of Chinese Academy of Sciences, Beijing; 100049, China
推荐引用方式
GB/T 7714
Zhou, Yi,Tang, Yan,Deng, Qinyuan,et al. Dimensional metrology of smooth micro structures utilizing the spatial modulation of white-light interference fringes[J]. Optics and Laser Technology,2017,93:187-193.
APA Zhou, Yi,Tang, Yan,Deng, Qinyuan,Liu, Junbo,Wang, Jian,&Zhao, Lixin.(2017).Dimensional metrology of smooth micro structures utilizing the spatial modulation of white-light interference fringes.Optics and Laser Technology,93,187-193.
MLA Zhou, Yi,et al."Dimensional metrology of smooth micro structures utilizing the spatial modulation of white-light interference fringes".Optics and Laser Technology 93(2017):187-193.
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