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Dimensional metrology of smooth micro structures utilizing the spatial modulation of white-light interference fringes
Zhou, Yi1,2; Tang, Yan1; Deng, Qinyuan1,2; Liu, Junbo1; Wang, Jian1; Zhao, Lixin1
Source PublicationOptics and Laser Technology
Volume93Pages:187-193
2017
Language英语
ISSN0030-3992
Indexed BySCI ; Ei
AbstractDimensional metrology for micro structure plays an important role in addressing quality issues and observing the performance of micro-fabricated products. In white light interferometry, the proposed method is expected to measure three-dimensional topography through modulation depth in spatial frequency domain. A normalized modulation depth is first obtained in the xy plane (image plane) for each CCD image individually. After that, the modulation depth of each pixel is analyzed along the scanning direction (z-axis) to reshape the topography of micro samples. Owing to the characteristics of modulation depth in broadband light interferometry, the method could effectively suppress the negative influences caused by light fluctuations and external irradiance disturbance. Both theory and experiments are elaborated in detail to verify that the modulation depth-based method can greatly level up the stability and sensitivity with satisfied precision in the measurement system. This technique can achieve an improved robustness in a complex measurement environment with the potential to be applied in online topography measurement such as chemistry and medical domains. © 2017
KeywordFrequency domain analysis - Interferometry - Microstructure - Phase measurement - System stability - Topography - Units of measurement
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/8855
Collection微电子装备总体研究室(四室)
Affiliation1.State Key Laboratory of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu; Sichuan; 610209, China;
2.University of Chinese Academy of Sciences, Beijing; 100049, China
Recommended Citation
GB/T 7714
Zhou, Yi,Tang, Yan,Deng, Qinyuan,et al. Dimensional metrology of smooth micro structures utilizing the spatial modulation of white-light interference fringes[J]. Optics and Laser Technology,2017,93:187-193.
APA Zhou, Yi,Tang, Yan,Deng, Qinyuan,Liu, Junbo,Wang, Jian,&Zhao, Lixin.(2017).Dimensional metrology of smooth micro structures utilizing the spatial modulation of white-light interference fringes.Optics and Laser Technology,93,187-193.
MLA Zhou, Yi,et al."Dimensional metrology of smooth micro structures utilizing the spatial modulation of white-light interference fringes".Optics and Laser Technology 93(2017):187-193.
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