Dynamic behavior of perforated parallel-plate actuator under squeeze film damping effect
Wang, Weimin1,2,3; Tao, Fenggang4; Wang, Qiang1; Qiu, Chuankai1; Chen, Zexiang2; Fan, Bin1
2017
发表期刊Microsystem Technologies
ISSN0946-7076
卷号23期号:2页码:411-419
摘要Dynamic performance is one of the most critical factors in many MEMS products, such as micro accelerometers, vibratory gyroscopes, micro deformable mirror, etc. Essentially, the dynamic behavior is totally determined by two factors: the internal factor, the stiffness of structure and the external factor, the damping of environment. In this paper both factors are analyzed accurately and a theoretical dynamic model of parallel-plate actuators is presented. The stiffness of the structure, i.e. the spring constant k of the suspension beam that supports the moving plate of the actuator, is achieved by many accurate experimental tests. The damping of environment, referring to the squeeze film damping coefficient c in parallel-plate actuators, is analyzed by calculation and FEA simulation. Further, we consider c a linear function of the actuator displacement, but not a constant value. This treatment greatly improves the accuracy of the dynamic model and could be applied in parallel-plate actuators with large displacement. Dynamic behaviors of the actuators under squeeze film damping, such as natural frequency, response time and bandwidth, are predicted based on the model. Three kinds of parallel-plate actuators are designed and fabricated using a surface micromachining process to verify the estimation of the presented theoretical model and experimental test results have showed good consistency with the theoretical analysis. The dynamic model proposed in this paper could be broadly applied in the MEMS/NEMS systems. © 2015, Springer-Verlag Berlin Heidelberg.
关键词Accelerometers - Actuators - Damping - Dynamic models - Micromachining - Stiffness - Surface micromachining
收录类别SCI ; Ei
语种英语
文献类型期刊论文
条目标识符http://ir.ioe.ac.cn/handle/181551/8843
专题微细加工光学技术国家重点实验室(开放室)
作者单位1.State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu; 610209, China;
2.School of Optoelectronic Information, University of Electronic Science and Technology of China, Chengdu; 610054, China;
3.University of Chinese Academy of Sciences, Beijing; 100049, China;
4.Institute of Electronic Engineering, Chinese Academy of Engineering Physics, Mianyang; 621900, China
推荐引用方式
GB/T 7714
Wang, Weimin,Tao, Fenggang,Wang, Qiang,et al. Dynamic behavior of perforated parallel-plate actuator under squeeze film damping effect[J]. Microsystem Technologies,2017,23(2):411-419.
APA Wang, Weimin,Tao, Fenggang,Wang, Qiang,Qiu, Chuankai,Chen, Zexiang,&Fan, Bin.(2017).Dynamic behavior of perforated parallel-plate actuator under squeeze film damping effect.Microsystem Technologies,23(2),411-419.
MLA Wang, Weimin,et al."Dynamic behavior of perforated parallel-plate actuator under squeeze film damping effect".Microsystem Technologies 23.2(2017):411-419.
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