IOE OpenIR  > 微电子装备总体研究室(四室)
Topography measurement of large-rangemicrostructures through advanced fourier-transformmethod and phase stitching in scanning broadband light interferometry
Zhou, Yi1,2; Tang, Yan1; Yang, Yong1; Hu, Song1
Source PublicationMicromachines
Volume8Issue:11Pages:319
2017
Language英语
ISSN2072-666X
AbstractScanning broadband light interferometry (SBLI) has been widely utilized in surfacemetrology due to its non-contact and high-accuracy method. In SBLI, phase evaluation through Fourier Transform (FT) is a prevalent and efficient technique, where the topography measurement can often be achieved through one interferogram. Nevertheless, the accuracy of the FT method would be significantly influenced by intensity modulation depth: "the lower the modulation of the pixel, the higher the error probability of its phase assignment". If the structure has a large enough range along the z-axis, several areas in an individual interferogram would be weakly modulated due to the limited depth of focus (DOF). In this paper,we propose an advanced FT-basedmethodwhen it comes to large-height structures. Spatial modulation depth is first calculated for each interferogram independently. After that, a binary control mask is reasonably constructed to identify the pixels that are valid for phase unwrapping. Then, a phase stitching method along the z-axis is carried out to conduct the large-height topography measurement within a giving field of view. The theoretical principle, simulation, and experimental validation are elaborated to demonstrate that the method can achieve an improved robustness for the reconstruction of large-range microstructures, the advantages of which include the elimination of stepping errors, the suppression of light fluctuations, and the freedom of a limited DOF. © 2017 by the authors.
KeywordMicrostructure - Modulation - Pixels - Topography
Indexed BySCI ; Ei
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/8842
Collection微电子装备总体研究室(四室)
Affiliation1.State Key Laboratory of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu; 610209, China;
2.University of Chinese Academy of Sciences, Beijing; 100049, China
Recommended Citation
GB/T 7714
Zhou, Yi,Tang, Yan,Yang, Yong,et al. Topography measurement of large-rangemicrostructures through advanced fourier-transformmethod and phase stitching in scanning broadband light interferometry[J]. Micromachines,2017,8(11):319.
APA Zhou, Yi,Tang, Yan,Yang, Yong,&Hu, Song.(2017).Topography measurement of large-rangemicrostructures through advanced fourier-transformmethod and phase stitching in scanning broadband light interferometry.Micromachines,8(11),319.
MLA Zhou, Yi,et al."Topography measurement of large-rangemicrostructures through advanced fourier-transformmethod and phase stitching in scanning broadband light interferometry".Micromachines 8.11(2017):319.
Files in This Item:
File Name/Size DocType Version Access License
2017-2082.pdf(4569KB)期刊论文出版稿开放获取CC BY-NC-SAApplication Full Text
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[Zhou, Yi]'s Articles
[Tang, Yan]'s Articles
[Yang, Yong]'s Articles
Baidu academic
Similar articles in Baidu academic
[Zhou, Yi]'s Articles
[Tang, Yan]'s Articles
[Yang, Yong]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[Zhou, Yi]'s Articles
[Tang, Yan]'s Articles
[Yang, Yong]'s Articles
Terms of Use
No data!
Social Bookmark/Share
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.