IOE OpenIR  > 微电子装备总体研究室(四室)
Topography measurement of large-rangemicrostructures through advanced fourier-transformmethod and phase stitching in scanning broadband light interferometry
Zhou, Yi1,2; Tang, Yan1; Yang, Yong1; Hu, Song1
2017
发表期刊Micromachines
ISSN2072-666X
卷号8期号:11页码:319
摘要Scanning broadband light interferometry (SBLI) has been widely utilized in surfacemetrology due to its non-contact and high-accuracy method. In SBLI, phase evaluation through Fourier Transform (FT) is a prevalent and efficient technique, where the topography measurement can often be achieved through one interferogram. Nevertheless, the accuracy of the FT method would be significantly influenced by intensity modulation depth: "the lower the modulation of the pixel, the higher the error probability of its phase assignment". If the structure has a large enough range along the z-axis, several areas in an individual interferogram would be weakly modulated due to the limited depth of focus (DOF). In this paper,we propose an advanced FT-basedmethodwhen it comes to large-height structures. Spatial modulation depth is first calculated for each interferogram independently. After that, a binary control mask is reasonably constructed to identify the pixels that are valid for phase unwrapping. Then, a phase stitching method along the z-axis is carried out to conduct the large-height topography measurement within a giving field of view. The theoretical principle, simulation, and experimental validation are elaborated to demonstrate that the method can achieve an improved robustness for the reconstruction of large-range microstructures, the advantages of which include the elimination of stepping errors, the suppression of light fluctuations, and the freedom of a limited DOF. © 2017 by the authors.
关键词Microstructure - Modulation - Pixels - Topography
收录类别SCI ; Ei
语种英语
文献类型期刊论文
条目标识符http://ir.ioe.ac.cn/handle/181551/8842
专题微电子装备总体研究室(四室)
作者单位1.State Key Laboratory of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu; 610209, China;
2.University of Chinese Academy of Sciences, Beijing; 100049, China
推荐引用方式
GB/T 7714
Zhou, Yi,Tang, Yan,Yang, Yong,et al. Topography measurement of large-rangemicrostructures through advanced fourier-transformmethod and phase stitching in scanning broadband light interferometry[J]. Micromachines,2017,8(11):319.
APA Zhou, Yi,Tang, Yan,Yang, Yong,&Hu, Song.(2017).Topography measurement of large-rangemicrostructures through advanced fourier-transformmethod and phase stitching in scanning broadband light interferometry.Micromachines,8(11),319.
MLA Zhou, Yi,et al."Topography measurement of large-rangemicrostructures through advanced fourier-transformmethod and phase stitching in scanning broadband light interferometry".Micromachines 8.11(2017):319.
条目包含的文件
文件名称/大小 文献类型 版本类型 开放类型 使用许可
2017-2082.pdf(4569KB)期刊论文出版稿开放获取CC BY-NC-SA请求全文
个性服务
推荐该条目
保存到收藏夹
查看访问统计
导出为Endnote文件
谷歌学术
谷歌学术中相似的文章
[Zhou, Yi]的文章
[Tang, Yan]的文章
[Yang, Yong]的文章
百度学术
百度学术中相似的文章
[Zhou, Yi]的文章
[Tang, Yan]的文章
[Yang, Yong]的文章
必应学术
必应学术中相似的文章
[Zhou, Yi]的文章
[Tang, Yan]的文章
[Yang, Yong]的文章
相关权益政策
暂无数据
收藏/分享
所有评论 (0)
暂无评论
 

除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。