| Topography measurement of large-rangemicrostructures through advanced fourier-transformmethod and phase stitching in scanning broadband light interferometry | |
| Zhou, Yi1,2; Tang, Yan1; Yang, Yong1; Hu, Song1 | |
| 2017 | |
| 发表期刊 | Micromachines
 |
| ISSN | 2072-666X |
| 卷号 | 8期号:11页码:319 |
| 摘要 | Scanning broadband light interferometry (SBLI) has been widely utilized in surfacemetrology due to its non-contact and high-accuracy method. In SBLI, phase evaluation through Fourier Transform (FT) is a prevalent and efficient technique, where the topography measurement can often be achieved through one interferogram. Nevertheless, the accuracy of the FT method would be significantly influenced by intensity modulation depth: "the lower the modulation of the pixel, the higher the error probability of its phase assignment". If the structure has a large enough range along the z-axis, several areas in an individual interferogram would be weakly modulated due to the limited depth of focus (DOF). In this paper,we propose an advanced FT-basedmethodwhen it comes to large-height structures. Spatial modulation depth is first calculated for each interferogram independently. After that, a binary control mask is reasonably constructed to identify the pixels that are valid for phase unwrapping. Then, a phase stitching method along the z-axis is carried out to conduct the large-height topography measurement within a giving field of view. The theoretical principle, simulation, and experimental validation are elaborated to demonstrate that the method can achieve an improved robustness for the reconstruction of large-range microstructures, the advantages of which include the elimination of stepping errors, the suppression of light fluctuations, and the freedom of a limited DOF. © 2017 by the authors. |
| 关键词 | Microstructure - Modulation - Pixels - Topography |
| 收录类别 | SCI ; Ei |
| 语种 | 英语 |
| 文献类型 | 期刊论文 |
| 条目标识符 | http://ir.ioe.ac.cn/handle/181551/8842 |
| 专题 | 微电子装备总体研究室（四室） |
| 作者单位 | 1.State Key Laboratory of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu; 610209, China; 2.University of Chinese Academy of Sciences, Beijing; 100049, China |
| 推荐引用方式 GB/T 7714 | Zhou, Yi,Tang, Yan,Yang, Yong,et al. Topography measurement of large-rangemicrostructures through advanced fourier-transformmethod and phase stitching in scanning broadband light interferometry[J]. Micromachines,2017,8(11):319. |
| APA | Zhou, Yi,Tang, Yan,Yang, Yong,&Hu, Song.(2017).Topography measurement of large-rangemicrostructures through advanced fourier-transformmethod and phase stitching in scanning broadband light interferometry.Micromachines,8(11),319. |
| MLA | Zhou, Yi,et al."Topography measurement of large-rangemicrostructures through advanced fourier-transformmethod and phase stitching in scanning broadband light interferometry".Micromachines 8.11(2017):319. |
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| 文件名称/大小 | 文献类型 | 版本类型 | 开放类型 | 使用许可 | ||
| 2017-2082.pdf（4569KB） | 期刊论文 | 出版稿 | 开放获取 | CC BY-NC-SA | 请求全文 | |
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