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Fabrication of micro-optics elements with arbitrary surface profiles based on one-step maskless grayscale lithography
Deng, Qinyuan1,2; Yang, Yong1; Gao, Hongtao1; Zhou, Yi1,2; He, Yu1; Hu, Song1
2017
发表期刊Micromachines
ISSN2072-666X
卷号8期号:10页码:314
摘要A maskless lithography method to realize the rapid and cost-effective fabrication of micro-optics elements with arbitrary surface profiles is reported. A digital micro-mirror device (DMD) is applied to flexibly modulate that the exposure dose according to the surface profile of the structure to be fabricated. Due to the fact that not only the relationship between the grayscale levels of the DMD and the exposure dose on the surface of the photoresist, but also the dependence of the exposure depth on the exposure dose, deviate from a linear relationship arising from the DMD and photoresist, respectively, and cannot be systemically eliminated, complicated fabrication art and large fabrication error will results. A method of compensating the two nonlinear effects is proposed that can be used to accurately design the digital grayscale mask and ensure a precise control of the surface profile of the structure to be fabricated. To testify to the reliability of this approach, several typical array elements with a spherical surface, aspherical surface, and conic surface have been fabricated and tested. The root-mean-square (RMS) between the test and design value of the surface height is about 0.1 μm. The proposed method of compensating the nonlinear effect in maskless lithography can be directly used to control the grayscale levels of the DMD for fabricating the structure with an arbitrary surface profile. © 2017 by the authors.
关键词Cost effectiveness - Lithography - Microoptics - Photoresists
收录类别SCI ; Ei
语种英语
文献类型期刊论文
条目标识符http://ir.ioe.ac.cn/handle/181551/8841
专题微电子装备总体研究室(四室)
作者单位1.State Key Laboratory of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu; 610209, China;
2.University of Chinese Academy of Sciences, Beijing; 100049, China
推荐引用方式
GB/T 7714
Deng, Qinyuan,Yang, Yong,Gao, Hongtao,et al. Fabrication of micro-optics elements with arbitrary surface profiles based on one-step maskless grayscale lithography[J]. Micromachines,2017,8(10):314.
APA Deng, Qinyuan,Yang, Yong,Gao, Hongtao,Zhou, Yi,He, Yu,&Hu, Song.(2017).Fabrication of micro-optics elements with arbitrary surface profiles based on one-step maskless grayscale lithography.Micromachines,8(10),314.
MLA Deng, Qinyuan,et al."Fabrication of micro-optics elements with arbitrary surface profiles based on one-step maskless grayscale lithography".Micromachines 8.10(2017):314.
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