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The effects of profile errors of microlens surfaces on laser beam homogenization
Cao, Axiu1,2; Pang, Hui1; Wang, Jiazhou1,2; Zhang, Man1; Chen, Jian2,3; Shi, Lifang1; Deng, Qiling1; Hu, Song1
2017
发表期刊Micromachines
ISSN2072-666X
卷号8期号:2页码:50
摘要Microlens arrays (MLAs) are key optical components in laser beam homogenization. However, due to imperfect surface profiles resulting from microfabrication, the functionalities of MLAs in beam modulation could be compromised to some extent. In order to address this issue, the effects of surface profile mismatches between ideal and fabricated MLAs on beam homogenization were analyzed. Four types of surface profile errors of MLAs were modeled theoretically and numerical simulations were conducted to quantitatively estimate the effects of these profile errors on beam homogenization. In addition, experiments were conducted to validate the simulation results, revealing that profile errors leading to optical deviations located on the apex of microlenses affected beam homogenization less than deviations located further away from it. This study can provide references for the further applications of MLAs in beam homogenization. © 2017 by the authors.
关键词Errors - Gears - Laser beams - Microanalysis - Microfabrication - Microlenses - Microoptics - Optical instrument lenses
收录类别SCI ; Ei
语种英语
文献类型期刊论文
条目标识符http://ir.ioe.ac.cn/handle/181551/8840
专题微电子装备总体研究室(四室)
作者单位1.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu; 610209, China;
2.University of Chinese Academy of Sciences, Beijing; 100049, China;
3.State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing; 100190, China
推荐引用方式
GB/T 7714
Cao, Axiu,Pang, Hui,Wang, Jiazhou,et al. The effects of profile errors of microlens surfaces on laser beam homogenization[J]. Micromachines,2017,8(2):50.
APA Cao, Axiu.,Pang, Hui.,Wang, Jiazhou.,Zhang, Man.,Chen, Jian.,...&Hu, Song.(2017).The effects of profile errors of microlens surfaces on laser beam homogenization.Micromachines,8(2),50.
MLA Cao, Axiu,et al."The effects of profile errors of microlens surfaces on laser beam homogenization".Micromachines 8.2(2017):50.
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