IOE OpenIR  > 微电子装备总体研究室(四室)
Spatial modulation assisted scanning white-light interferometry for noise suppression
Deng, Qinyuan1; Liu, Junbo2; Tang, Yan3; Zhou, Yi2; Yang, Yong2; Li, Jinlong2; Hu, Song2
2017
Source PublicationIEEE Photonics Technology Letters
ISSN1041-1135
AbstractA route of spatial modulation assisted scanning white-light interferometry with the inhibition of background noises and light source fluctuations for the topography measurement of micro/nano-structure surface was explored in this letter. The spatial modulation frequency was introduced by tilting the sample at a small angle to separate the noise signals and interference signals in the spatial frequency domain. A band-pass filter and a normalization processing were also applied with the purpose of signal-to-noise-ratio (SNR) improvement and contrast enhancement. The frequency domain analysis (FDA) was then enrolled in the eliminaiton of 2 ambiguity for the surface recovery with high-presicion. Both the theoretical analysis and the experiment results reveal the validity of spatial modulation assisted scanning white-light interferometry and its potentials in high-fidelity measurement of smooth surfaces regardless of external disturbances. IEEE
KeywordBandpass filters - Frequency domain analysis - Interferometry - Light sources - Scanning - Signal to noise ratio - Spurious signal noise - Surface measurement
Indexed ByEi
Language英语
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/8813
Collection微电子装备总体研究室(四室)
Affiliation1.University of Chinese academy of Sciences, Beijing 100049, China and State Key Laboratory of Optical Technologies for Microfabrication, institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, Sichuan 610209, China.;
2.State Key Laboratory of Optical Technologies for Microfabrication, Institute of Optics Electronics, Chinese Academy of Sciences, Chengdu, 610209, China.;
3.Institute of Optics Electronics, Chinese Academy of Sciences, Chengdu, 610209, China.
Recommended Citation
GB/T 7714
Deng, Qinyuan,Liu, Junbo,Tang, Yan,et al. Spatial modulation assisted scanning white-light interferometry for noise suppression[J]. IEEE Photonics Technology Letters,2017.
APA Deng, Qinyuan.,Liu, Junbo.,Tang, Yan.,Zhou, Yi.,Yang, Yong.,...&Hu, Song.(2017).Spatial modulation assisted scanning white-light interferometry for noise suppression.IEEE Photonics Technology Letters.
MLA Deng, Qinyuan,et al."Spatial modulation assisted scanning white-light interferometry for noise suppression".IEEE Photonics Technology Letters (2017).
Files in This Item:
File Name/Size DocType Version Access License
2017-2053.pdf(1382KB)期刊论文出版稿开放获取CC BY-NC-SAApplication Full Text
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[Deng, Qinyuan]'s Articles
[Liu, Junbo]'s Articles
[Tang, Yan]'s Articles
Baidu academic
Similar articles in Baidu academic
[Deng, Qinyuan]'s Articles
[Liu, Junbo]'s Articles
[Tang, Yan]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[Deng, Qinyuan]'s Articles
[Liu, Junbo]'s Articles
[Tang, Yan]'s Articles
Terms of Use
No data!
Social Bookmark/Share
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.