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Spatial modulation assisted scanning white-light interferometry for noise suppression
Deng, Qinyuan1; Liu, Junbo2; Tang, Yan3; Zhou, Yi2; Yang, Yong2; Li, Jinlong2; Hu, Song2
2017
发表期刊IEEE Photonics Technology Letters
ISSN1041-1135
摘要A route of spatial modulation assisted scanning white-light interferometry with the inhibition of background noises and light source fluctuations for the topography measurement of micro/nano-structure surface was explored in this letter. The spatial modulation frequency was introduced by tilting the sample at a small angle to separate the noise signals and interference signals in the spatial frequency domain. A band-pass filter and a normalization processing were also applied with the purpose of signal-to-noise-ratio (SNR) improvement and contrast enhancement. The frequency domain analysis (FDA) was then enrolled in the eliminaiton of 2 ambiguity for the surface recovery with high-presicion. Both the theoretical analysis and the experiment results reveal the validity of spatial modulation assisted scanning white-light interferometry and its potentials in high-fidelity measurement of smooth surfaces regardless of external disturbances. IEEE
关键词Bandpass filters - Frequency domain analysis - Interferometry - Light sources - Scanning - Signal to noise ratio - Spurious signal noise - Surface measurement
收录类别Ei
语种英语
文献类型期刊论文
条目标识符http://ir.ioe.ac.cn/handle/181551/8813
专题微电子装备总体研究室(四室)
作者单位1.University of Chinese academy of Sciences, Beijing 100049, China and State Key Laboratory of Optical Technologies for Microfabrication, institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, Sichuan 610209, China.;
2.State Key Laboratory of Optical Technologies for Microfabrication, Institute of Optics Electronics, Chinese Academy of Sciences, Chengdu, 610209, China.;
3.Institute of Optics Electronics, Chinese Academy of Sciences, Chengdu, 610209, China.
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GB/T 7714
Deng, Qinyuan,Liu, Junbo,Tang, Yan,et al. Spatial modulation assisted scanning white-light interferometry for noise suppression[J]. IEEE Photonics Technology Letters,2017.
APA Deng, Qinyuan.,Liu, Junbo.,Tang, Yan.,Zhou, Yi.,Yang, Yong.,...&Hu, Song.(2017).Spatial modulation assisted scanning white-light interferometry for noise suppression.IEEE Photonics Technology Letters.
MLA Deng, Qinyuan,et al."Spatial modulation assisted scanning white-light interferometry for noise suppression".IEEE Photonics Technology Letters (2017).
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