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Thermal Stability of Mid-infrared SiO2Thin Films Deposited by Dual Ion Beam Sputtering Method
Shang, Peng1,2; Ji, Yi-Qin1; Zhao, Dao-Ling3; Xiong, Sheng-Ming4; Liu, Hua-Song1; Li, Ling-Hui4; Tian, Dong4
2017
发表期刊Guangzi Xuebao/Acta Photonica Sinica
ISSN10044213
卷号46期号:8页码:0816003
摘要SiO2films are deposited on Si and sapphire (α-Al2O3) substrates by Dual Ion beam sputtering method. The microstructure, surface morphology, residual stress and optical stability of SiO2coating in the wavelength of 0.4~1.2 μm and 3~5 μm are investigated, systematically. The results indicate that the residual stress goes through a local minimum value at ~400. There is a close relationship between the optical constant and the surface conditions, residual stress, microstructure of SiO2film. As the temperature increases up to 1 000, SiO2film can keep well thermal stability without notable damage morphology. The result can give some guidance for designing the optical coatings used in harsh environments. © 2017, Science Press. All right reserved.
关键词Ions - Microstructure - Optical coatings - Residual stresses - Sapphire - Silica - Sputtering - Stability - Thermodynamic stability - Thin films
收录类别Ei
语种英语
文献类型期刊论文
条目标识符http://ir.ioe.ac.cn/handle/181551/8803
专题薄膜光学技术研究室(十一室)
作者单位1.Tianjin Key Laboratory of Optical Thin Film, Tianjin Jin Hang Institute Technical Physics, Tianjin; 300192, China;
2.State Key Labs of Modern Optical Instrumentation, Zhejiang University, Hangzhou; 310027, China;
3.Shandong Institute of Metrology, Jinan; 250014, China;
4.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu; 610209, China
推荐引用方式
GB/T 7714
Shang, Peng,Ji, Yi-Qin,Zhao, Dao-Ling,et al. Thermal Stability of Mid-infrared SiO2Thin Films Deposited by Dual Ion Beam Sputtering Method[J]. Guangzi Xuebao/Acta Photonica Sinica,2017,46(8):0816003.
APA Shang, Peng.,Ji, Yi-Qin.,Zhao, Dao-Ling.,Xiong, Sheng-Ming.,Liu, Hua-Song.,...&Tian, Dong.(2017).Thermal Stability of Mid-infrared SiO2Thin Films Deposited by Dual Ion Beam Sputtering Method.Guangzi Xuebao/Acta Photonica Sinica,46(8),0816003.
MLA Shang, Peng,et al."Thermal Stability of Mid-infrared SiO2Thin Films Deposited by Dual Ion Beam Sputtering Method".Guangzi Xuebao/Acta Photonica Sinica 46.8(2017):0816003.
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