| The optical and electrical properties of ZnO:Al thin films deposited at low temperatures by RF magnetron sputtering | |
| Tang, Ping1,2; Li, Bing2; Feng, Lianghuan2 | |
| Source Publication | Ceramics International
 |
| 2017 | |
| Language | 英语 |
| ISSN | 0272-8842 |
| Abstract | Several ZnO:Al thin films have been successfully deposited on glass substrates at different substrate temperatures by RF (radio frequency) magnetron sputtering method. Effects of the substrate temperatures on the optical and electrical properties of these ZnO:Al thin films were investigated. The UV-VIS-NIR spectra of the ZnO:Al thin films revealed that the average optical transmittances in the visible range are very high, up to 88%. X-ray diffraction results showed that crystallization of these films was improved at higher substrate temperature. The band gaps of ZnO:Al thin films deposited at 25°, 150°, 200°, and 250° are 3.59eV, 3.55eV, 3.53eV, and 3.48eV, respectively. The Hall-effect measurement demonstrated that the electrical resistivity of the films decreased with the increase of the substrate temperature and the electrical resistivity reached 1.990×10-3Ωcm at 250°. © 2017 Elsevier Ltd and Techna Group S.r.l. |
| Keyword | Aluminum - Electric conductivity - Energy gap - Magnetron sputtering - Sputtering - Substrates - Ultraviolet spectroscopy - X ray diffraction - Zinc oxide |
| Indexed By | Ei |
| Document Type | 期刊论文 |
| Identifier | http://ir.ioe.ac.cn/handle/181551/8789 |
| Collection | 微细加工光学技术国家重点实验室（开放室） |
| Affiliation | 1.State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, P.O. Box 350, Chengdu 610209, China; 2.College of Materials Science and Engineering, Sichuan University, Chengdu 610064, China |
| Recommended Citation GB/T 7714 | Tang, Ping,Li, Bing,Feng, Lianghuan. The optical and electrical properties of ZnO:Al thin films deposited at low temperatures by RF magnetron sputtering[J]. Ceramics International,2017. |
| APA | Tang, Ping,Li, Bing,&Feng, Lianghuan.(2017).The optical and electrical properties of ZnO:Al thin films deposited at low temperatures by RF magnetron sputtering.Ceramics International. |
| MLA | Tang, Ping,et al."The optical and electrical properties of ZnO:Al thin films deposited at low temperatures by RF magnetron sputtering".Ceramics International (2017). |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 2017-2029.pdf（1091KB） | 期刊论文 | 出版稿 | 开放获取 | CC BY-NC-SA | Application Full Text | |
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