The optical and electrical properties of ZnO:Al thin films deposited at low temperatures by RF magnetron sputtering
Tang, Ping1,2; Li, Bing2; Feng, Lianghuan2
2017
发表期刊Ceramics International
ISSN0272-8842
摘要Several ZnO:Al thin films have been successfully deposited on glass substrates at different substrate temperatures by RF (radio frequency) magnetron sputtering method. Effects of the substrate temperatures on the optical and electrical properties of these ZnO:Al thin films were investigated. The UV-VIS-NIR spectra of the ZnO:Al thin films revealed that the average optical transmittances in the visible range are very high, up to 88%. X-ray diffraction results showed that crystallization of these films was improved at higher substrate temperature. The band gaps of ZnO:Al thin films deposited at 25°, 150°, 200°, and 250° are 3.59eV, 3.55eV, 3.53eV, and 3.48eV, respectively. The Hall-effect measurement demonstrated that the electrical resistivity of the films decreased with the increase of the substrate temperature and the electrical resistivity reached 1.990×10-3Ωcm at 250°. © 2017 Elsevier Ltd and Techna Group S.r.l.
关键词Aluminum - Electric conductivity - Energy gap - Magnetron sputtering - Sputtering - Substrates - Ultraviolet spectroscopy - X ray diffraction - Zinc oxide
收录类别Ei
语种英语
文献类型期刊论文
条目标识符http://ir.ioe.ac.cn/handle/181551/8789
专题微细加工光学技术国家重点实验室(开放室)
作者单位1.State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, P.O. Box 350, Chengdu 610209, China;
2.College of Materials Science and Engineering, Sichuan University, Chengdu 610064, China
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Tang, Ping,Li, Bing,Feng, Lianghuan. The optical and electrical properties of ZnO:Al thin films deposited at low temperatures by RF magnetron sputtering[J]. Ceramics International,2017.
APA Tang, Ping,Li, Bing,&Feng, Lianghuan.(2017).The optical and electrical properties of ZnO:Al thin films deposited at low temperatures by RF magnetron sputtering.Ceramics International.
MLA Tang, Ping,et al."The optical and electrical properties of ZnO:Al thin films deposited at low temperatures by RF magnetron sputtering".Ceramics International (2017).
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