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Modeling near-null testing method of a freeform surface with a deformable mirror compensator
He, Yiwei1,2,3; Huang, Lei4; Hou, Xi1; Fan, Wu1; Liang, Rongguang2
Source PublicationApplied Optics
Volume56Issue:33Pages:9132-9138
2017
Language英语
ISSN1559-128X
Indexed BySCI ; Ei
AbstractWe present and analyze a new measurement method of freeform surfaces with a deformable mirror (DM), which functions as a wavefront compensator. We discuss the maximum slope compensation of a DM in the first-order approximation and derive how to calculate the ideal DM form. A constrained optimization procedure is conducted to ensure the actual DM form fits the ideal DM form as closely as possible. To demonstrate the feasibility and understand the measurable range of our method, we evaluate freeform surfaces with a single Zernike term, the first 36 random Zernike terms, and 230 random Zernike terms. A tolerance analysis of the DM position is carried out to show the effect of the tilt and the decenter of the DM on the measurement accuracy. Our studies show that the proposed system is very flexible for freeform surface metrology. © 2017 Optical Society of America.
KeywordConstrained optimization - Deformation - Fits and tolerances - Mirrors - Testing
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/8780
Collection先光中心
Affiliation1.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu; Sichuan; 610209, China;
2.College of Optical Sciences, University of Arizona, Tucson; AZ; 85721, United States;
3.University of Chinese Academy of Sciences, Beijing; 100039, China;
4.Center for Photonics and Electronics, Department of Precision Instruments, Tsinghua University, Beijing; 100084, China
Recommended Citation
GB/T 7714
He, Yiwei,Huang, Lei,Hou, Xi,et al. Modeling near-null testing method of a freeform surface with a deformable mirror compensator[J]. Applied Optics,2017,56(33):9132-9138.
APA He, Yiwei,Huang, Lei,Hou, Xi,Fan, Wu,&Liang, Rongguang.(2017).Modeling near-null testing method of a freeform surface with a deformable mirror compensator.Applied Optics,56(33),9132-9138.
MLA He, Yiwei,et al."Modeling near-null testing method of a freeform surface with a deformable mirror compensator".Applied Optics 56.33(2017):9132-9138.
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