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Modeling near-null testing method of a freeform surface with a deformable mirror compensator
He, Yiwei1,2,3; Huang, Lei4; Hou, Xi1; Fan, Wu1; Liang, Rongguang2
2017
发表期刊Applied Optics
ISSN1559-128X
卷号56期号:33页码:9132-9138
摘要We present and analyze a new measurement method of freeform surfaces with a deformable mirror (DM), which functions as a wavefront compensator. We discuss the maximum slope compensation of a DM in the first-order approximation and derive how to calculate the ideal DM form. A constrained optimization procedure is conducted to ensure the actual DM form fits the ideal DM form as closely as possible. To demonstrate the feasibility and understand the measurable range of our method, we evaluate freeform surfaces with a single Zernike term, the first 36 random Zernike terms, and 230 random Zernike terms. A tolerance analysis of the DM position is carried out to show the effect of the tilt and the decenter of the DM on the measurement accuracy. Our studies show that the proposed system is very flexible for freeform surface metrology. © 2017 Optical Society of America.
关键词Constrained optimization - Deformation - Fits and tolerances - Mirrors - Testing
收录类别SCI ; Ei
语种英语
文献类型期刊论文
条目标识符http://ir.ioe.ac.cn/handle/181551/8780
专题先光中心
作者单位1.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu; Sichuan; 610209, China;
2.College of Optical Sciences, University of Arizona, Tucson; AZ; 85721, United States;
3.University of Chinese Academy of Sciences, Beijing; 100039, China;
4.Center for Photonics and Electronics, Department of Precision Instruments, Tsinghua University, Beijing; 100084, China
推荐引用方式
GB/T 7714
He, Yiwei,Huang, Lei,Hou, Xi,et al. Modeling near-null testing method of a freeform surface with a deformable mirror compensator[J]. Applied Optics,2017,56(33):9132-9138.
APA He, Yiwei,Huang, Lei,Hou, Xi,Fan, Wu,&Liang, Rongguang.(2017).Modeling near-null testing method of a freeform surface with a deformable mirror compensator.Applied Optics,56(33),9132-9138.
MLA He, Yiwei,et al."Modeling near-null testing method of a freeform surface with a deformable mirror compensator".Applied Optics 56.33(2017):9132-9138.
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