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Characterization of micro structure through hybrid interference and phase determination in broadband light interferometry
Zhou, Yi1,2; Tang, Yan1; Zhu, Jiangping3; Deng, Qinyuan1,2; Yang, Yong1; Zhao, Lixin1; Hu, Song1
2017
发表期刊Applied Optics
ISSN1559-128X
卷号56期号:8页码:2301-2306
摘要Broadband light interferometry, which is a well-developed method for surface profiling, has been applied with great success in the past years. Conventional multi-wavelength interferometric surface profilers mostly utilize the light irradiance to locate the zero fringe order, but the accuracy and stability can be negatively influenced by intensity fluctuations and external light disturbance, which is a serious problem. In this paper we discuss a hybrid technique combining light intensity and spectral modulation to determine zero optical path difference in which the light instability can be effectively suppressed. Additionally, the phase evaluation at each pixel will provide a high vertical resolution to obtain the characterization of the micro structure. The hybrid-interference method will not only improve the sensitivity of the measurement system but also level up the robustness and stability. Both simulation and experiment on a micro-dome structure have been presented to verify the effectiveness. Furthermore, the proposed method may be promising to replace the previously intensity-based method, especially in a complex application environment. © 2017 Optical Society of America.
关键词Microstructure
收录类别SCI ; Ei
语种英语
文献类型期刊论文
条目标识符http://ir.ioe.ac.cn/handle/181551/8776
专题微电子装备总体研究室(四室)
作者单位1.State Key Laboratory of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu; Sichuan; 610209, China;
2.University of Chinese Academy of Sciences, Beijing; 100049, China;
3.Institute of Image and Graphics, School of Computer Science and Technology, Sichuan University, Chengdu; 610064, China
推荐引用方式
GB/T 7714
Zhou, Yi,Tang, Yan,Zhu, Jiangping,et al. Characterization of micro structure through hybrid interference and phase determination in broadband light interferometry[J]. Applied Optics,2017,56(8):2301-2306.
APA Zhou, Yi.,Tang, Yan.,Zhu, Jiangping.,Deng, Qinyuan.,Yang, Yong.,...&Hu, Song.(2017).Characterization of micro structure through hybrid interference and phase determination in broadband light interferometry.Applied Optics,56(8),2301-2306.
MLA Zhou, Yi,et al."Characterization of micro structure through hybrid interference and phase determination in broadband light interferometry".Applied Optics 56.8(2017):2301-2306.
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