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Characterization of micro structure through hybrid interference and phase determination in broadband light interferometry
Zhou, Yi1,2; Tang, Yan1; Zhu, Jiangping3; Deng, Qinyuan1,2; Yang, Yong1; Zhao, Lixin1; Hu, Song1
2017
Source PublicationApplied Optics
ISSN1559-128X
Volume56Issue:8Pages:2301-2306
AbstractBroadband light interferometry, which is a well-developed method for surface profiling, has been applied with great success in the past years. Conventional multi-wavelength interferometric surface profilers mostly utilize the light irradiance to locate the zero fringe order, but the accuracy and stability can be negatively influenced by intensity fluctuations and external light disturbance, which is a serious problem. In this paper we discuss a hybrid technique combining light intensity and spectral modulation to determine zero optical path difference in which the light instability can be effectively suppressed. Additionally, the phase evaluation at each pixel will provide a high vertical resolution to obtain the characterization of the micro structure. The hybrid-interference method will not only improve the sensitivity of the measurement system but also level up the robustness and stability. Both simulation and experiment on a micro-dome structure have been presented to verify the effectiveness. Furthermore, the proposed method may be promising to replace the previously intensity-based method, especially in a complex application environment. © 2017 Optical Society of America.
KeywordMicrostructure
Indexed BySCI ; Ei
Language英语
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/8776
Collection微电子装备总体研究室(四室)
Affiliation1.State Key Laboratory of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu; Sichuan; 610209, China;
2.University of Chinese Academy of Sciences, Beijing; 100049, China;
3.Institute of Image and Graphics, School of Computer Science and Technology, Sichuan University, Chengdu; 610064, China
Recommended Citation
GB/T 7714
Zhou, Yi,Tang, Yan,Zhu, Jiangping,et al. Characterization of micro structure through hybrid interference and phase determination in broadband light interferometry[J]. Applied Optics,2017,56(8):2301-2306.
APA Zhou, Yi.,Tang, Yan.,Zhu, Jiangping.,Deng, Qinyuan.,Yang, Yong.,...&Hu, Song.(2017).Characterization of micro structure through hybrid interference and phase determination in broadband light interferometry.Applied Optics,56(8),2301-2306.
MLA Zhou, Yi,et al."Characterization of micro structure through hybrid interference and phase determination in broadband light interferometry".Applied Optics 56.8(2017):2301-2306.
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