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硅基光子晶体板的光刻和反应离子刻蚀
张磊; 张晓玉; 张福甲; 姚汉民; 杜春雷; 刘强; 潘莉
Source Publication光电工程
Volume31Issue:2Pages:1-3,7
2004
Language中文
Indexed ByEi
Subtype期刊论文
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/874
Collection微细加工光学技术国家重点实验室(开放室)
Corresponding Author张磊
Recommended Citation
GB/T 7714
张磊,张晓玉,张福甲,等. 硅基光子晶体板的光刻和反应离子刻蚀[J]. 光电工程,2004,31(2):1-3,7.
APA 张磊.,张晓玉.,张福甲.,姚汉民.,杜春雷.,...&潘莉.(2004).硅基光子晶体板的光刻和反应离子刻蚀.光电工程,31(2),1-3,7.
MLA 张磊,et al."硅基光子晶体板的光刻和反应离子刻蚀".光电工程 31.2(2004):1-3,7.
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