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振幅分割无掩模激光干涉光刻的实现方法
张锦; 冯伯儒; 郭永康
Source Publication光电工程
Volume31Issue:2Pages:11-15
2004
Language中文
Indexed ByEi
Subtype期刊论文
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/872
Collection微细加工光学技术国家重点实验室(开放室)
Corresponding Author张锦
Recommended Citation
GB/T 7714
张锦,冯伯儒,郭永康. 振幅分割无掩模激光干涉光刻的实现方法[J]. 光电工程,2004,31(2):11-15.
APA 张锦,冯伯儒,&郭永康.(2004).振幅分割无掩模激光干涉光刻的实现方法.光电工程,31(2),11-15.
MLA 张锦,et al."振幅分割无掩模激光干涉光刻的实现方法".光电工程 31.2(2004):11-15.
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