IOE OpenIR  > 微细加工光学技术国家重点实验室(开放室)
成像干涉光刻技术及其频域分析
刘娟; 冯伯儒; 张锦
Source Publication光电工程
Volume31Issue:10Pages:24-27
2004
Language中文
Indexed ByEi
Subtype期刊论文
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/869
Collection微细加工光学技术国家重点实验室(开放室)
Corresponding Author刘娟
Recommended Citation
GB/T 7714
刘娟,冯伯儒,张锦. 成像干涉光刻技术及其频域分析[J]. 光电工程,2004,31(10):24-27.
APA 刘娟,冯伯儒,&张锦.(2004).成像干涉光刻技术及其频域分析.光电工程,31(10),24-27.
MLA 刘娟,et al."成像干涉光刻技术及其频域分析".光电工程 31.10(2004):24-27.
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