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精确控制大数值孔径微透镜列阵面阵的显影阈值方法
董小春; 杜春雷
Source Publication光学学报
Volume24Issue:7Pages:869-872
2004
Language中文
Indexed ByEi
Subtype期刊论文
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/866
Collection微细加工光学技术国家重点实验室(开放室)
Corresponding Author董小春
Recommended Citation
GB/T 7714
董小春,杜春雷. 精确控制大数值孔径微透镜列阵面阵的显影阈值方法[J]. 光学学报,2004,24(7):869-872.
APA 董小春,&杜春雷.(2004).精确控制大数值孔径微透镜列阵面阵的显影阈值方法.光学学报,24(7),869-872.
MLA 董小春,et al."精确控制大数值孔径微透镜列阵面阵的显影阈值方法".光学学报 24.7(2004):869-872.
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