精确控制大数值孔径微透镜列阵面阵的显影阈值方法 | |
董小春; 杜春雷 | |
Source Publication | 光学学报
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Volume | 24Issue:7Pages:869-872 |
2004 | |
Language | 中文 |
Indexed By | Ei |
Subtype | 期刊论文 |
Document Type | 期刊论文 |
Identifier | http://ir.ioe.ac.cn/handle/181551/866 |
Collection | 微细加工光学技术国家重点实验室(开放室) |
Corresponding Author | 董小春 |
Recommended Citation GB/T 7714 | 董小春,杜春雷. 精确控制大数值孔径微透镜列阵面阵的显影阈值方法[J]. 光学学报,2004,24(7):869-872. |
APA | 董小春,&杜春雷.(2004).精确控制大数值孔径微透镜列阵面阵的显影阈值方法.光学学报,24(7),869-872. |
MLA | 董小春,et al."精确控制大数值孔径微透镜列阵面阵的显影阈值方法".光学学报 24.7(2004):869-872. |
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