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A surface irregularity compensation alignment method for all-reflective optical system
Li, Lian1; Zhang, Ming1; Ma, Tianmeng1
2016
发表期刊Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment
ISSN0277-786X
卷号9684页码:968431
文章类型C
摘要Surface irregularity of optical elements is one of the errors caused in manufacturing process, which has a bad influence on optical system image quality. This image quality deterioration can't be neglected especially in some all-reflective optical systems. A method by rotating the mirrors for compensating the surface irregularity is put forward in the paper. Firstly, the surface irregularity of all the mirrors is analyzed and the most closely matched mirrors are chosen for one set of system alignment. Then, the wavefront characteristic of optical system and the surface irregularity of each mirror represented by Zernike polynomial are studied, and the relationship between them is analyzed. The calculation of the rotate angle is described in detail. A numerical simulation of the method has been performed for two sets of three-mirror optical system to verify the ability and accuracy of the method. The results show that the astigmatism of the optical system caused by the surface irregularity can be decreased and the image quality of both the two systems can be improved effectively. The method is especially suitable for multiple sets of optical systems alignment. © 2016 SPIE.
关键词Alignment Image Quality Manufacture Mirrors Numerical Methods Optical Testing
DOI10.1117/12.2244939
收录类别SCI ; Ei
语种英语
项目资助者Chinese Academy of Sciences, Institute of Optics and Electronics (IOE) ; The Chinese Optical Society (COS)
WOS记录号WOS:000387429500109
引用统计
文献类型期刊论文
条目标识符http://ir.ioe.ac.cn/handle/181551/8566
专题总装中心
作者单位1. Institute of Optics and Electronics, Chinese Academy of Science, Chengdu
2.610209, China
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GB/T 7714
Li, Lian,Zhang, Ming,Ma, Tianmeng. A surface irregularity compensation alignment method for all-reflective optical system[J]. Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment,2016,9684:968431.
APA Li, Lian,Zhang, Ming,&Ma, Tianmeng.(2016).A surface irregularity compensation alignment method for all-reflective optical system.Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment,9684,968431.
MLA Li, Lian,et al."A surface irregularity compensation alignment method for all-reflective optical system".Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment 9684(2016):968431.
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