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Detection for flatness of large surface based on structured light
He, Wenyan1,2; Cao, Xuedong2; Long, Kuang2; Peng, Zhang2
2016
发表期刊Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment
ISSN0277-786X
卷号9684页码:96841W
文章类型C
摘要In order to get flatness of a large plane, this paper set up a measurement system, composed by Line Structured Light, imaging system, CCD, etc. Line Structured Light transmits parallel fringes at a proper angle onto the plane which is measured; the imaging system and CCD locate above the plane to catch the fringes. When the plane is perfect, CCD will catch straight fringes; however, the real plane is not perfect; according to the theory of projection, the fringes caught by CCD will be distorted by convex and concave. Extract the center of line fringes to obtain the distortion of the fringe, according to the functional relationship between the distortion of fringes and the height which is measured, then we will get flatness of the entire surface. Data from experiment approached the analysis of theory. In the simulation, the vertical resolution is 0.0075 mm per pixel when measuring a plane of 400mm×400mm, choosing the size of CCD 4096×4096, at the angle 85°. Helped by sub-pixel, the precision will get the level of submicron. There are two obvious advantages: method of surface sampling can increase the efficiency for auto-repairing of machines; considering the center of fringe is required mainly in this system, as a consequence, there is no serious demand for back light. © 2016 SPIE.
关键词Imaging Systems Manufacture Pixels
DOI10.1117/12.2243409
收录类别SCI ; Ei
语种英语
项目资助者Chinese Academy of Sciences, Institute of Optics and Electronics (IOE) ; The Chinese Optical Society (COS)
WOS记录号WOS:000387429500068
引用统计
文献类型期刊论文
条目标识符http://ir.ioe.ac.cn/handle/181551/8564
专题质量处(质检中心)
作者单位1. Institute of Optics and Electronics, Chinese Academy of Sciences, P.O.Box 305, Chengdu
2.610209, China
3. University of Chinese Academy of Sciences, Beijing
4.100049, China
推荐引用方式
GB/T 7714
He, Wenyan,Cao, Xuedong,Long, Kuang,et al. Detection for flatness of large surface based on structured light[J]. Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment,2016,9684:96841W.
APA He, Wenyan,Cao, Xuedong,Long, Kuang,&Peng, Zhang.(2016).Detection for flatness of large surface based on structured light.Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment,9684,96841W.
MLA He, Wenyan,et al."Detection for flatness of large surface based on structured light".Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment 9684(2016):96841W.
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