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Analysis of adjustment error in aspheric null testing with CGH
He, Yiwei1,2; Xi, Hou1; Chen, Qiang1; Li, Chaoqiang1; Zhu, Xiaoqiang1; Song, Weihong1
Source PublicationProceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment
Volume9684Pages:968444
2016
Language英语
ISSN0277-786X
DOI10.1117/12.2243226
SubtypeC
AbstractGenerally, in order to gain high accuracy in aspheric testing, a piece of high-quality CGH (computer generated hologram) is inserted behind transmission sphere to generate specified wave-front to match aspheric part. According to the difference in function, the CGH is divided into 2 parts: The center region, called as testing hologram, is used to generate specified aspheric wave-front; the outer ring, called as alignment hologram, is used to align the location of CGH behind transmission sphere. Although alignment hologram is used, there is still some adjustment error from both CGH and aspheric part, such as tilt, eccentricity and defocus. Here we will stimulate the effect of these error sources on the accuracy that is rms after the piston, tilt and power are removed, when testing a specified aspheric part. It is easy to conclude that the total measurement error is about 2 nm and the defocus of CGH contributes most. © 2016 SPIE.
KeywordAspherics Electron Holography Errors Holograms Lithography Manufacture Optical Testing Wavefronts
Indexed BySCI ; Ei
WOS IDWOS:000387429500148
Citation statistics
Cited Times:1[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/8531
Collection先光中心
Affiliation1. Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, Sichuan
2.610209, China
3. University of Chinese Academy of Sciences, Beijing
4.100039, China
Recommended Citation
GB/T 7714
He, Yiwei,Xi, Hou,Chen, Qiang,et al. Analysis of adjustment error in aspheric null testing with CGH[J]. Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment,2016,9684:968444.
APA He, Yiwei,Xi, Hou,Chen, Qiang,Li, Chaoqiang,Zhu, Xiaoqiang,&Song, Weihong.(2016).Analysis of adjustment error in aspheric null testing with CGH.Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment,9684,968444.
MLA He, Yiwei,et al."Analysis of adjustment error in aspheric null testing with CGH".Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment 9684(2016):968444.
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