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Analysis of adjustment error in aspheric null testing with CGH
He, Yiwei1,2; Xi, Hou1; Chen, Qiang1; Li, Chaoqiang1; Zhu, Xiaoqiang1; Song, Weihong1
2016
发表期刊Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment
ISSN0277-786X
卷号9684页码:968444
文章类型C
摘要Generally, in order to gain high accuracy in aspheric testing, a piece of high-quality CGH (computer generated hologram) is inserted behind transmission sphere to generate specified wave-front to match aspheric part. According to the difference in function, the CGH is divided into 2 parts: The center region, called as testing hologram, is used to generate specified aspheric wave-front; the outer ring, called as alignment hologram, is used to align the location of CGH behind transmission sphere. Although alignment hologram is used, there is still some adjustment error from both CGH and aspheric part, such as tilt, eccentricity and defocus. Here we will stimulate the effect of these error sources on the accuracy that is rms after the piston, tilt and power are removed, when testing a specified aspheric part. It is easy to conclude that the total measurement error is about 2 nm and the defocus of CGH contributes most. © 2016 SPIE.
关键词Aspherics Electron Holography Errors Holograms Lithography Manufacture Optical Testing Wavefronts
DOI10.1117/12.2243226
收录类别SCI ; Ei
语种英语
项目资助者Chinese Academy of Sciences, Institute of Optics and Electronics (IOE) ; The Chinese Optical Society (COS)
WOS记录号WOS:000387429500148
引用统计
被引频次:1[WOS]   [WOS记录]     [WOS相关记录]
文献类型期刊论文
条目标识符http://ir.ioe.ac.cn/handle/181551/8531
专题先光中心
作者单位1. Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, Sichuan
2.610209, China
3. University of Chinese Academy of Sciences, Beijing
4.100039, China
推荐引用方式
GB/T 7714
He, Yiwei,Xi, Hou,Chen, Qiang,et al. Analysis of adjustment error in aspheric null testing with CGH[J]. Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment,2016,9684:968444.
APA He, Yiwei,Xi, Hou,Chen, Qiang,Li, Chaoqiang,Zhu, Xiaoqiang,&Song, Weihong.(2016).Analysis of adjustment error in aspheric null testing with CGH.Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment,9684,968444.
MLA He, Yiwei,et al."Analysis of adjustment error in aspheric null testing with CGH".Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment 9684(2016):968444.
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