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Performance evaluation of pitch lap in correcting mid-spatial-frequency errors under different smoothing parameters
Xu, Lichao1,2; Wan, Yongjian1; Liu, Haitao1; Wang, Jia1
2016
Source PublicationProceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
ISSN0277-786X
Volume9683Pages:96831W
SubtypeC
AbstractSmoothing is a convenient and efficient way to restrain middle spatial frequency (MSF) errors. Based on the experience, lap diameter, rotation speed, lap pressure and the hardness of pitch layer are important to correcting MSF errors. Therefore, nine groups of experiments are designed with the orthogonal method to confirm the significance of the above parameters. Based on the Zhang's model, PV (Peak and Valley) and RMS (Root Mean Square) versus processing cycles are analyzed before and after smoothing. At the same time, the smoothing limit and smoothing rate for different parameters to correct MSF errors are analyzed. Combined with the deviation analysis, we distinguish between dominant and subordinate parameters, and find out the optimal combination and law of various parameters, so as to guide the further research and fabrication. © 2016 SPIE.
KeywordManufacture
DOI10.1117/12.2243613
Indexed BySCI ; Ei
Language英语
Funding OrganizationChinese Academy of Sciences, Institute of Optics and Electronics (IOE) ; The Chinese Optical Society (COS)
WOS IDWOS:000387745800067
Citation statistics
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/8521
Collection先光中心
Affiliation1. Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu
2.610209, China
3. University of Chinese Academy of Sciences, Beijing
4.100049, China
Recommended Citation
GB/T 7714
Xu, Lichao,Wan, Yongjian,Liu, Haitao,et al. Performance evaluation of pitch lap in correcting mid-spatial-frequency errors under different smoothing parameters[J]. Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies,2016,9683:96831W.
APA Xu, Lichao,Wan, Yongjian,Liu, Haitao,&Wang, Jia.(2016).Performance evaluation of pitch lap in correcting mid-spatial-frequency errors under different smoothing parameters.Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies,9683,96831W.
MLA Xu, Lichao,et al."Performance evaluation of pitch lap in correcting mid-spatial-frequency errors under different smoothing parameters".Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies 9683(2016):96831W.
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