IOE OpenIR  > 先光中心
Performance evaluation of pitch lap in correcting mid-spatial-frequency errors under different smoothing parameters
Xu, Lichao1,2; Wan, Yongjian1; Liu, Haitao1; Wang, Jia1
2016
发表期刊Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
ISSN0277-786X
卷号9683页码:96831W
文章类型C
摘要Smoothing is a convenient and efficient way to restrain middle spatial frequency (MSF) errors. Based on the experience, lap diameter, rotation speed, lap pressure and the hardness of pitch layer are important to correcting MSF errors. Therefore, nine groups of experiments are designed with the orthogonal method to confirm the significance of the above parameters. Based on the Zhang's model, PV (Peak and Valley) and RMS (Root Mean Square) versus processing cycles are analyzed before and after smoothing. At the same time, the smoothing limit and smoothing rate for different parameters to correct MSF errors are analyzed. Combined with the deviation analysis, we distinguish between dominant and subordinate parameters, and find out the optimal combination and law of various parameters, so as to guide the further research and fabrication. © 2016 SPIE.
关键词Manufacture
DOI10.1117/12.2243613
收录类别SCI ; Ei
语种英语
项目资助者Chinese Academy of Sciences, Institute of Optics and Electronics (IOE) ; The Chinese Optical Society (COS)
WOS记录号WOS:000387745800067
引用统计
文献类型期刊论文
条目标识符http://ir.ioe.ac.cn/handle/181551/8521
专题先光中心
作者单位1. Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu
2.610209, China
3. University of Chinese Academy of Sciences, Beijing
4.100049, China
推荐引用方式
GB/T 7714
Xu, Lichao,Wan, Yongjian,Liu, Haitao,et al. Performance evaluation of pitch lap in correcting mid-spatial-frequency errors under different smoothing parameters[J]. Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies,2016,9683:96831W.
APA Xu, Lichao,Wan, Yongjian,Liu, Haitao,&Wang, Jia.(2016).Performance evaluation of pitch lap in correcting mid-spatial-frequency errors under different smoothing parameters.Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies,9683,96831W.
MLA Xu, Lichao,et al."Performance evaluation of pitch lap in correcting mid-spatial-frequency errors under different smoothing parameters".Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies 9683(2016):96831W.
条目包含的文件
文件名称/大小 文献类型 版本类型 开放类型 使用许可
2016-2101.pdf(392KB)期刊论文作者接受稿开放获取CC BY-NC-SA请求全文
个性服务
推荐该条目
保存到收藏夹
查看访问统计
导出为Endnote文件
谷歌学术
谷歌学术中相似的文章
[Xu, Lichao]的文章
[Wan, Yongjian]的文章
[Liu, Haitao]的文章
百度学术
百度学术中相似的文章
[Xu, Lichao]的文章
[Wan, Yongjian]的文章
[Liu, Haitao]的文章
必应学术
必应学术中相似的文章
[Xu, Lichao]的文章
[Wan, Yongjian]的文章
[Liu, Haitao]的文章
相关权益政策
暂无数据
收藏/分享
所有评论 (0)
暂无评论
 

除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。