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UV spectrum-integral Talbot lithography for amplitude periodic micro-grating fabrication
Deng, Qian1,2; Liu, Junbo1; Zhou, Shaolin3; Tang, Yan1; Zhao, Lixin1; Hu, Song1; Chen, Yinghong4
Source PublicationProceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials
Volume9685Pages:96850M
2016
Language英语
ISSN0277-786X
DOI10.1117/12.2243456
Indexed BySCI ; Ei
WOS IDWOS:000387429600022
SubtypeC
AbstractThe spectrum-integral Talbot lithography (STIL) was introduced into the fabrication of one-dimensional micro gratings using the broad-band UV illumination in this paper. In the process of spectrum-integral Talbot lithography, the self-images and π-phase-shifted images generated by different wave lengths overlap and integrate collectively to enormously extend the continuous depth-of-focus area since a certain distance away from the mask. As a result, the route of STIL proves to be of great potential for periodic frequency-doubling in good contrast without any complex improvement and operation to the traditional proximity lithographic system of UV mask aligner. © 2016 SPIE.
KeywordCrystal Symmetry Frequency Doublers Lithography Manufacture Microoptics Optical Devices Phase Shift Ultraviolet Spectroscopy
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Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/8512
Collection光电探测与信号处理研究室(五室)
Affiliation1. State Key Laboratory of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu
2.610209, China
3. University of Chinese Academy of Sciences, Beijing
4.100049, China
5. School of Electronic and Information Engineering, South China University of Technology, Guangzhou
6.510640, China
7. State Key Laboratory of Polymer Materials Engineering(Sichuan University), Chengdu
8.610065, China
Recommended Citation
GB/T 7714
Deng, Qian,Liu, Junbo,Zhou, Shaolin,et al. UV spectrum-integral Talbot lithography for amplitude periodic micro-grating fabrication[J]. Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials,2016,9685:96850M.
APA Deng, Qian.,Liu, Junbo.,Zhou, Shaolin.,Tang, Yan.,Zhao, Lixin.,...&Chen, Yinghong.(2016).UV spectrum-integral Talbot lithography for amplitude periodic micro-grating fabrication.Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials,9685,96850M.
MLA Deng, Qian,et al."UV spectrum-integral Talbot lithography for amplitude periodic micro-grating fabrication".Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials 9685(2016):96850M.
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