UV spectrum-integral Talbot lithography for amplitude periodic micro-grating fabrication
Deng, Qian1,2; Liu, Junbo1; Zhou, Shaolin3; Tang, Yan1; Zhao, Lixin1; Hu, Song1; Chen, Yinghong4
2016
发表期刊Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials
ISSN0277-786X
卷号9685页码:96850M
文章类型C
摘要The spectrum-integral Talbot lithography (STIL) was introduced into the fabrication of one-dimensional micro gratings using the broad-band UV illumination in this paper. In the process of spectrum-integral Talbot lithography, the self-images and π-phase-shifted images generated by different wave lengths overlap and integrate collectively to enormously extend the continuous depth-of-focus area since a certain distance away from the mask. As a result, the route of STIL proves to be of great potential for periodic frequency-doubling in good contrast without any complex improvement and operation to the traditional proximity lithographic system of UV mask aligner. © 2016 SPIE.
关键词Crystal Symmetry Frequency Doublers Lithography Manufacture Microoptics Optical Devices Phase Shift Ultraviolet Spectroscopy
DOI10.1117/12.2243456
收录类别SCI ; Ei
语种英语
项目资助者Chinese Academy of Sciences, Institute of Optics and Electronics (IOE) ; The Chinese Optical Society (COS)
WOS记录号WOS:000387429600022
引用统计
文献类型期刊论文
条目标识符http://ir.ioe.ac.cn/handle/181551/8512
专题光电探测与信号处理研究室(五室)
作者单位1. State Key Laboratory of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu
2.610209, China
3. University of Chinese Academy of Sciences, Beijing
4.100049, China
5. School of Electronic and Information Engineering, South China University of Technology, Guangzhou
6.510640, China
7. State Key Laboratory of Polymer Materials Engineering(Sichuan University), Chengdu
8.610065, China
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Deng, Qian,Liu, Junbo,Zhou, Shaolin,et al. UV spectrum-integral Talbot lithography for amplitude periodic micro-grating fabrication[J]. Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials,2016,9685:96850M.
APA Deng, Qian.,Liu, Junbo.,Zhou, Shaolin.,Tang, Yan.,Zhao, Lixin.,...&Chen, Yinghong.(2016).UV spectrum-integral Talbot lithography for amplitude periodic micro-grating fabrication.Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials,9685,96850M.
MLA Deng, Qian,et al."UV spectrum-integral Talbot lithography for amplitude periodic micro-grating fabrication".Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials 9685(2016):96850M.
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