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High precision locating control system based on VCM for Talbot lithography
Yao, Jingwei1,2; Zhao, Lixin1,2; Deng, Qian1,2; Hu, Song1,2
2016
发表期刊Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials
ISSN0277-786X
卷号9685页码:96850L
文章类型C
摘要Aiming at the high precision and efficiency requirements of Z-direction locating in Talbot lithography, a control system based on Voice Coil Motor (VCM) was designed. In this paper, we built a math model of VCM and its moving characteristic was analyzed. A double-closed loop control strategy including position loop and current loop were accomplished. The current loop was implemented by driver, in order to achieve the rapid follow of the system current. The position loop was completed by the digital signal processor (DSP) and the position feedback was achieved by high precision linear scales. Feed forward control and position feedback Proportion Integration Differentiation (PID) control were applied in order to compensate for dynamic lag and improve the response speed of the system. And the high precision and efficiency of the system were verified by simulation and experiments. The results demonstrated that the performance of Z-direction gantry was obviously improved, having high precision, quick responses, strong real-time and easily to expend for higher precision. © 2016 SPIE.
关键词Control Systems Digital Signal Processors Efficiency Feedback Lithography Manufacture Materials Testing Optical Devices Signal Processing Structural Design Three Term Control Systems
DOI10.1117/12.2243616
收录类别SCI ; Ei
语种英语
项目资助者Chinese Academy of Sciences, Institute of Optics and Electronics (IOE) ; The Chinese Optical Society (COS)
WOS记录号WOS:000387429600021
引用统计
文献类型期刊论文
条目标识符http://ir.ioe.ac.cn/handle/181551/8506
专题微电子装备总体研究室(四室)
作者单位1. Institution of Optics and Electronics, Chinese Academy of Sciences, Chengdu
2.610209, China
3. University of Chinese Academy of Sciences, Beijing
4.100039, China
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GB/T 7714
Yao, Jingwei,Zhao, Lixin,Deng, Qian,et al. High precision locating control system based on VCM for Talbot lithography[J]. Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials,2016,9685:96850L.
APA Yao, Jingwei,Zhao, Lixin,Deng, Qian,&Hu, Song.(2016).High precision locating control system based on VCM for Talbot lithography.Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials,9685,96850L.
MLA Yao, Jingwei,et al."High precision locating control system based on VCM for Talbot lithography".Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials 9685(2016):96850L.
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