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Thickness measurement of transparent film by white-light interferometry
Deng, Qinyuan1,2; Zhou, Yi1,2; Liu, Junbo1; Yao, Jingwei1,2; Hu, Song1
2016
发表期刊Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials
ISSN0277-786X
卷号9685页码:968506
文章类型C
摘要White-light scanning interferometry plays an important role in precise profile metrology of microstructure. However, applying this approach may also be limited because of the optical reflection behavior of the surface. While there is a thin film on the surface, the reflection behavior of top and bottom of the thin-film will cause severer phase errors. Recently, the method by combining both reflectometry and white-light scanning interferometry is proposed to measure the film thickness and surface profile. This article firstly explains the principle of the proposed method and then verifies the feasibility of the thickness-measurement method for transparent film on a Silicon surface. Both of the algorithm and the experiment system have been optimized to measure the film thickness with high precision. © 2016 SPIE.
关键词Film Thickness Manufacture Materials Testing Optical Devices Optical Films Reflection Reflectometers Structural Design Thickness Gages Thickness Measurement Thin Films
DOI10.1117/12.2243601
收录类别SCI ; Ei
语种英语
项目资助者Chinese Academy of Sciences, Institute of Optics and Electronics (IOE) ; The Chinese Optical Society (COS)
WOS记录号WOS:000387429600006
引用统计
被引频次:1[WOS]   [WOS记录]     [WOS相关记录]
文献类型期刊论文
条目标识符http://ir.ioe.ac.cn/handle/181551/8505
专题微电子装备总体研究室(四室)
作者单位1. State Key Laboratory of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu
2.610209, China
3. University of Chinese Academy of Sciences, Beijing
4.100049, China
推荐引用方式
GB/T 7714
Deng, Qinyuan,Zhou, Yi,Liu, Junbo,et al. Thickness measurement of transparent film by white-light interferometry[J]. Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials,2016,9685:968506.
APA Deng, Qinyuan,Zhou, Yi,Liu, Junbo,Yao, Jingwei,&Hu, Song.(2016).Thickness measurement of transparent film by white-light interferometry.Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials,9685,968506.
MLA Deng, Qinyuan,et al."Thickness measurement of transparent film by white-light interferometry".Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials 9685(2016):968506.
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