| Thickness measurement of transparent film by white-light interferometry | |
| Deng, Qinyuan1,2; Zhou, Yi1,2; Liu, Junbo1; Yao, Jingwei1,2; Hu, Song1 | |
| 2016 | |
| Source Publication | Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials
 |
| ISSN | 0277-786X |
| Volume | 9685Pages:968506 |
| Subtype | C |
| Abstract | White-light scanning interferometry plays an important role in precise profile metrology of microstructure. However, applying this approach may also be limited because of the optical reflection behavior of the surface. While there is a thin film on the surface, the reflection behavior of top and bottom of the thin-film will cause severer phase errors. Recently, the method by combining both reflectometry and white-light scanning interferometry is proposed to measure the film thickness and surface profile. This article firstly explains the principle of the proposed method and then verifies the feasibility of the thickness-measurement method for transparent film on a Silicon surface. Both of the algorithm and the experiment system have been optimized to measure the film thickness with high precision. © 2016 SPIE. |
| Keyword | Film Thickness Manufacture Materials Testing Optical Devices Optical Films Reflection Reflectometers Structural Design Thickness Gages Thickness Measurement Thin Films |
| DOI | 10.1117/12.2243601 |
| Indexed By | SCI ; Ei |
| Language | 英语 |
| Funding Organization | Chinese Academy of Sciences, Institute of Optics and Electronics (IOE) ; The Chinese Optical Society (COS) |
| WOS ID | WOS:000387429600006 |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://ir.ioe.ac.cn/handle/181551/8505 |
| Collection | 微电子装备总体研究室（四室） |
| Affiliation | 1. State Key Laboratory of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 2.610209, China 3. University of Chinese Academy of Sciences, Beijing 4.100049, China |
| Recommended Citation GB/T 7714 | Deng, Qinyuan,Zhou, Yi,Liu, Junbo,et al. Thickness measurement of transparent film by white-light interferometry[J]. Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials,2016,9685:968506. |
| APA | Deng, Qinyuan,Zhou, Yi,Liu, Junbo,Yao, Jingwei,&Hu, Song.(2016).Thickness measurement of transparent film by white-light interferometry.Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials,9685,968506. |
| MLA | Deng, Qinyuan,et al."Thickness measurement of transparent film by white-light interferometry".Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials 9685(2016):968506. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 2016-2106.pdf（4133KB） | 期刊论文 | 作者接受稿 | 开放获取 | CC BY-NC-SA | Application Full Text | |
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